Herunterladen Inhalt Inhalt Diese Seite drucken

Technical Information; Description Of The Turbopump - Varian Turbo-V 1800A Bedienungshandbuch

Inhaltsverzeichnis

Werbung

DESCRIPTION OF THE TURBOPUMP

The Turbo-V1800A pump is available in three
models. The three models, which differ only in the
high vacuum flange, are:
− Model 969-9064 with ISO 250 high vacuum
flange
− Model 969-9065 with ConFlat 12" external di-
ameter high vacuum flange
− Model 969-9066 with ConFlat 12.5" external
diameter high vacuum flange
Model 969-9064
Model 969-9065
Model 969-9066
The Turbo-V1800A pump consists of a medium
frequency motor driving a turbine fitted with 12
bladed stages. The turbine rotates in an anticlock-
wise direction when viewed from the high vacuum
flange end.
The turbine is made of high-strength, light alumin-
ium alloy, and is machined from a single block of
aluminium. The first 3 high vacuum stages have
blade angles of 40°, the subsequent four stages
have blade angles of 30°, and the lower stages
have blade angles of 20°.
The turbine rotor is supported by high precision
ceramic ball bearings lubricated with a proprietary
process located on the forevacuum side of the
pump.
The static blades of the stator are made of
stainless steel. These are supported and accu-
rately positioned by spacer rings.
During normal operation, the motor is fed with a
voltage of 90 Vac three-phase at 450 Hz. To re-
duce losses during start-up to a minimum, the fre-
quency increases according to a ramp with a
higher initial voltage/frequency ratio.
A water jacket surrounds the pump stator and is
used to cool the motor, which operates in the fore-
vacuum region of the pump. Cooling water is con-
nected to the pump via two riffled nozzles on the
cooling jacket.
A thermistor sensor is mounted directly on the mo-
tor stator and pump body to prevent the pump
from overheating. The thermistor sensor, the mo-
tor stator windings and the earth are connected to
a Turbo-V controller through a 7 pin socket on the
side of the pump.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.02 µm.
The pump must be mounted vertically or upside
down, with a maximum allowable slope of 10°. It
can be suspended by inlet flange or rest upon its
support legs. The connection of the forevacuum on
the side of the pump is an ISO 63 flange.
25

TECHNICAL INFORMATION

87-900-867-01(A)

Werbung

Inhaltsverzeichnis
loading

Diese Anleitung auch für:

969-9064969-9065969-9066

Inhaltsverzeichnis