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Gas Purge Valve Installation; Vent Valve Installation; Vent Device Installation - Varian Turbo-V 1800A Bedienungshandbuch

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NOTE
The turbopump must be "baked" only when
operating with an inlet pressure less than 10
mbar and with water cooling.
CAUTION
If the chamber of the system is "baked" at a high
temperature, a shield should be installed to pre-
vent thermal radiation heating the high vacuum
flange on the pump. The maximum temperature
allowed for the inlet flange is 120° C.

GAS PURGE VALVE INSTALLATION

A gas purge valve is available to protect the pump
bearings against particulate and corrosive gases
that could move into the pump.
To install the gas purge valve it is necessary to
lock the purge valve in position using the KF klamp
as shown in the following figure.

VENT VALVE INSTALLATION

The vent valve mod. 969-9833 allows to avoid un-
desired venting of the pump during a temporary
power failure (5 sec maximum), and enables an
automatic vent operation.
-4
Screw the vent valve into the vent port of the pump
and tighten it using a 10 mm. hexagonal spanner
with a torque of 2.5 Nm.
Do not overtighten the valve as this may damage
the thread on the pump.

VENT DEVICE INSTALLATION

The vent device mod. 969-9831 allows to avoid
undesired venting of the pump during a temporary
power failure (adjustable time up to 36 min.), and
enables an automatic vent operation.
Assemble the seal ring and lock the vent device in
position using the KF klamp as shown in the fol-
lowing figure.
29
TECHNICAL INFORMATION
CAUTION
87-900-867-01(A)

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969-9064969-9065969-9066

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