Inhaltsverzeichnis
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TV 1001
Pump models:
969-8939
Controller model:
969-8978
87-900-973-01
SEPTEMBER 2003
SEM
969-8940
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Inhaltsverzeichnis
Verwandte Anleitungen für Varian TV 1001 SEM 969-8939
Inhaltszusammenfassung für Varian TV 1001 SEM 969-8939
- Seite 1 TV 1001 MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES Pump models: MANUAL DE INSTRUÇÕES 969-8939 969-8940 BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG Controller model: BRUKSANVISNING 969-8978 INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-973-01 SEPTEMBER 2003...
- Seite 2 TV 1001 SEM...
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Seite 5: Inhaltsverzeichnis
ISTRUZIONI PER L’USO ...........................1 GEBRAUCHSANLEITUNG ..........................3 MODE D’EMPLOI ...............................5 INSTRUCCIONES DE USO ..........................7 INSTRUÇÕES PARA O USO..........................9 GEBRUIKSAANWIJZINGEN..........................11 BRUGSANVISNING ............................13 BRUKSANVISNING............................15 BRUKERVEILEDNING .............................17 KÄYTTÖOHJEET .............................19 PDHGIES CRHSEWS ............................21 INSTRUCTIONS FOR USE..........................23 TECHNICAL INFORMATION ...........................25 DESCRIPTION OF THE TV 1001 SEM..................25 Pump Description ......................25 Controller Description ......................26 TECHNICAL SPECIFICATION ....................26... -
Seite 6: Informazioni Generali
Varian prima dell'utilizzo dell'apparecchiatura. La Varian si ri- ATTENZIONE! tiene sollevata da eventuali responsabilità dovute all'inosser- Onde evitare problemi di degasamento, non toccare con le vanza totale o parziale delle istruzioni, ad uso improprio da mani nude i componenti destinati ad essere esposti al vuoto. -
Seite 7: Fissaggio Della Pompa
120 °C. In caso di guasto è possibile usufruire del servizio di riparazio- ne Varian o del "Varian advanced exchange service", che per- mette di ottenere un sistema rigenerato in sostituzione di quello PERICOLO! guasto. -
Seite 8: Gebrauchsanleitung
ACHTUNG! LAGERUNG Das Klebeband abziehen und den Schutzdeckel erst bei Anschluß der Turbopumpe an das System abnehmen. Um ein Höchstmaß an Effizienz und Zuverlässigkeit der Varian Turbomolekularpumpen zu gewährleisten, sind die folgenden Anweisungen zu beachten: • Während des Transports, der Handhabung und der Einla- gerung der Pumpen dürfen die folgenden Grenzwerte nicht... -
Seite 9: Befestigung Der Pumpe
Aufheizung der Vakuumkammer darf die Tempera- tur am Eingangsflansch 120°C nicht überschreiten. Bei Defekten kann der Varian Service oder der "Varian advan- ced exchange service" in Anspruch genommen werden, der ein generalüberholtes System als Ersatz für das defekte System GEFAHR! zur Verfügung stellt. -
Seite 10: Indications Generales
à la directive CEE 85/399 que toute autre indication supplémentaire fournie par Varian qui en matière de protection de l'environnement. décline par conséquent toute responsabilité en cas de non respect total ou partiel des instructions données, d'utilisation... -
Seite 11: Fixation De La Pompe
"advanced exchange service", remplir et faire parvenir au la bride de fermeture. bureau Varian de votre région la fiche "Sécurité et Santé" jointe Eviter de toucher la turbopompe ainsi que ses accessoires au présent manuel d'instructions. Une copie de cette fiche de- éventuels pendant les opérations de chauffage. -
Seite 12: Información General
Varian antes de completamente reciclable y cumple con la directiva CEE 85/399 usar el aparato. Varian se considera libre de posibles para la preservación del medio ambiente. responsabilidades debidas al incumplimiento total o parcial de... -
Seite 13: Fijación De La Bomba
A modo de ejemplo, la brida ISO-K puede fijarse con mordazas Para encender el TV 1001 SEM basta con suministrar la de acero de alta resistencia (como el modelo Varian IC 63250 tensión de alimentación. El controlador incorporado reconoce DCMZ). -
Seite 14: Instalação
Varian antes de CEE 85/399 para a protecção do meio ambiente. utilizar a aparelhagem. A Varian não se responsabiliza pela inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não ATENÇÃO! - Seite 15 Acendimento e Utilização do TV 1001 SEM Por exemplo, o flange ISO-K pode ser fixado com bornes de aço de alta resistência (como o modelo Varian IC 63250 Para ligar o TV 1001 SEM é suficiente fornecer a tensão de DCMZ).
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Seite 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat EEG milieurichtlijn 85/399. in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik door niet hiervoor opgeleid... - Seite 17 Inschakeling en gebruik van de TV 1001 SEM De ISO-K-flens kan bijvoorbeeld bevestigd worden met stalen klemmen met een hoge weerstand (zoals het model Varian IC Om de TV 1001 SEM in te schakelen is het voldoende om deze 63250 DCMZ).
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Seite 18: Brugsanvisning
Komponenter, der skal udsættes for vakuum, må ikke berøres information fra Varian, før udstyret anvendes. Varian tager ikke med bare hænder, idet der er risiko for afgasning. Anvend altid ansvar for skader helt eller delvis som følge af tilsidesættelse af handsker eller anden lignende beskyttelse. - Seite 19 ISO-K-flangen kan eksempelvis fastspændes ved hjælp af Pumpen startes første gang ved hjælp af SOFT START stålklemmer med høj styrke (f.eks. modellen Varian IC 63250 metoden. Når startprocessen er afsluttet, frakobles denne DCMZ).
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Seite 20: Bruksanvisning
Komponenter som skall utsättas för vakuum får inte hanteras dokumentation från Varian före användning av utrustningen. med bara händer p g a kontamineringsrisken. Använd alltid Varian tar inget ansvar för skador helt eller delvis till följd av handskar eller liknande skydd. åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen... - Seite 21 Om pumpen havererar, kontakta Varian reparationsverkstad bruksanvisning. eller Varian utbytesservice, som kan ersätta systemet med ett Innan du använder systemet ska du utföra alla elektriska och renoverat system. pneumatiska anslutningar. Om vakuumkammaren uppvärms får OBSERVERA temperaturen vid inloppet aldrig överstiga 120°C.
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Seite 22: Brukerveiledning
Brukeren bør lese denne brukerveiledningen og all annen For å unngå avgassingsproblemer, må ingen del som skal informasjon fra Varian før utstyret tas i bruk. Varian kan ikke utsettes for vakuum håndteres med bare hendene. Bruk alltid holdes ansvarlig for hendelser som skjer på grunn av hansker eller andre og passende verneutstyr. - Seite 23 MYK START igjen er det nødvendig å tilbakestille ISO-K-flensen kan f.eks. festes ved hjelp av stålklemmer med modusen software avsnittet “RS høy styrke (f.eks. modellen Varian IC 63250 DCMZ). COMMUNICATION DESCRIPTION” tillegget “Teknisk Den følgende tabellen beskriver antall klemmer IC 63250 Informasjon”).
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Seite 24: Käyttöohjeet
Jotta kaasun vuoto-ongelmilta vältyttäisiin, ei tyhjiölle altistuviin ohjekirja ja muut Varianin toimittamat lisätiedot. Varian ei ota osiin tule koskea paljain käsin. Käyttäkää aina käsineitä tai vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden muuta sopivaa suojausta. täydellisestä osittaisesta laiminlyönnistä,... - Seite 25 Siten pumpun seuraavat teräskiinnikkeillä (esim. malli Varian IC 63250 DCMZ). käynnistykset tapahtuvat ilman “Soft Start” -toimintoa. Jotta Seuraavassa taulukossa ilmoitetaan jokaiselle laipalle tarvittava käynnistys voitaisiin suorittaa uudelleen “Soft Start” IC 63250 DCMZ -kiinnitinmäärä ja niiden kiristysmomentit.
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Seite 26: Pdhgies Crhsews
£llh prÒsqeth plhrofor∂a gumn£ c◊ria ta sustatik£ pou e∂nai proorism◊na na ekteqoÚn sto pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H kenÒ. Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikÿ ÿ merikÿ... - Seite 27 120°C. Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj Varian ÿ sto “Varian advanced exchange service”, pou saj d∂nei th dunatÒthta na antikatastÿsete thn calasm◊nh antl∂a me m∂a KINDUNOS! £llh anazwogonhm◊nh.
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Seite 28: General Information
Varian before operating the equipment. to handle components which will be exposed to vacuum. Al- Varian will not be held responsible for any events occurring due ways use gloves or other appropriate protection. to non-compliance, even partial, with these instructions, im-... -
Seite 29: Pump Fixing
50 °C. This paragraph details the fundamental operating procedures. In the case of breakdown, contact your local Varian service Make all electrical an pneumatic connections before the use of center who can supply a reconditioned system to replace that the system. -
Seite 30: Description Of The Tv 1001 Sem
TECHNICAL INFORMATION DESCRIPTION OF THE TV 1001 SEM Pump Description The TV 1001 SEM pumping system consists of a The pump consists of a high frequency motor driv- pump with a dedicated controller fixed to it. The ing a turbine fitted with 8 bladed stages and 4 system is available in two models that differ in the Macrotorr stages. -
Seite 31: Controller Description
TECHNICAL INFORMATION Controller Description Cooling require- Forced air or water The dedicated controller is a solid-state frequency ments converter which is driven by a single chip micro- Coolant water Minimum flow: 200 l/h (0.89 GPM) computer and is composed of two PCBs which in- Temperature: +10 °C to +20 °C clude power supply and 3-phase output, analog Pressure: 3 to 5 bar (45 to 75 psi) -
Seite 32: Tv 1001 Sem Outline
TECHNICAL INFORMATION Typical Vibration Spectrum TV 1001 SEM OUTLINE The following figure shows the TV 1001 SEM outlines (dimensions are in mm [inches]). Turbo 1001 Macro Torr Turbo - 1001 Macro Torr 87-900-973-01... - Seite 33 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-973-01...
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Seite 34: Interconnections
TECHNICAL INFORMATION INTERCONNECTIONS J1 - IN-OUT The following figure shows the TV 1001 SEM in- terconnections. This connector carries all the input and output sig- Turbo V 1001 Macro Torr nals to remote control the TV 1001 SEM. It is a 15-pins D type connector; the available sig- nals are detailed in the table, the following para- graphs describe the signal characteristics and use. - Seite 35 TECHNICAL INFORMATION For example: SPEED SETTING: PWM input signal to set the pump speed. The PWM signal characteristics must − reference quantity: frequency be the following: − threshold: 500 Hz • frequency: 100 Hz +/-20% − hysteresis: 1% • ampitude: 24 V max −...
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Seite 36: How To Connect The Open-Collector Inputs Of The Controller
TECHNICAL INFORMATION How to connect the open-collector inputs of the controller Here below there are the typical connections of the open collector input of TV 1001 SEM to an exter- nal system. Two cases are considered: 1. the customer supplies the 24 Vdc 2. -
Seite 37: How To Connect The Outputs Of The Controller
TECHNICAL INFORMATION How to connect the outputs of the controller RS 232/RS 485 COMMUNICATION DESCRIPTION The following figure shows a typical logic output connection (relay coil) but any other device may be Both the RS 232 and the RS 485 interfaces are connected e.g. - Seite 38 TECHNICAL INFORMATION − Source: Controller <DATA> = an alphanumeric ASCII string with Destination: PC the data to be written into the window. In case of a reading command this field is not present. The field length is variable according to the data type as per the following table: STX ADDR ACK ETX DATA TYPE...
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Seite 39: Window Meanings
Off = 0 type 1 = Current (on = closed) 2 = Time (default = 1) (default = 0) Reserved to Varian service Set Point (default = 643) threshold Set the vent Automatic = 0 (expressed valve (see note 1.) -
Seite 40: Inlet Screen Installation
The inlet screen, however, does reduce the pump- mand) ing speed by about 10%. Reserved to Varian service The inlet screen is fitted in the upper part of the pump, as shown in the figure. QE5XXXX EPROM (where “XXXX”... -
Seite 41: Air Cooling Kit Installation
TECHNICAL INFORMATION The following figure shows the overall flange di- To fix the fan to the TV 1001 SEM case execute mensions with the protection screen fitted on the following procedure (see the following figure): pump with ISO 200F flange and pump with ISO 1. -
Seite 42: Water Cooling Kit Installation
TECHNICAL INFORMATION Fan specification: − air flow: 55 l/s (120 CFM) − input voltage: 120 Vac 50-60 Hz − maximum power: 17 W − dimensions: 127 x 127 mm (5 x 5 inches) To fix the fan to the pump, position it ensuring that the holes in the plate line up with those in the pump base. -
Seite 43: Vent Accessories
TECHNICAL INFORMATION To install the vent valve, unscrew the threaded NOTE plug (see figure below). These hoses must be held on the respective noz- zles using hose clips to avoid that the tube(s) gets loose or disconnected during operation. Cooling may be carried out either through an open circuit with eventual discharge of the water, or us- ing a closed circuit cooling system. -
Seite 44: Standard Rack Controller Compatible
TECHNICAL INFORMATION Screw the flange mod. 969-9108 on the pump, tak- Standard Rack Controller Compatible ing care of the o-ring right position. Vent Valve mod. 969-9843 Assemble the seal ring and lock the vent device in position using the KF klamp. This vent valve has a fixed delay time of about 5 sec. -
Seite 45: Double Damper
TECHNICAL INFORMATION Double Damper If you need an higher damping factor (lower vibra- tion transmitted from pump to system) you can as- semble the pump with a series of two single dampers (for more information please refer to the relevant instruction manual). In the following table you can find the typical val- ues of the damping factor (G) for the double damper. -
Seite 46: Tv 1001 Sem Controller Installation
TECHNICAL INFORMATION TV 1001 SEM CONTROLLER INSTALLATION Side mounting The controller can be mounted in two position: NOTE − bottom mounting (as per the complete system) The L-shaped bracket (P/N 969-9298) is available as an option. − side mounting. See the following figure. To install the controller execute the following pro- cedures. -
Seite 47: Typical Layout Diagram
TECHNICAL INFORMATION TYPICAL LAYOUT DIAGRAM With Standard Rack Controller With Navigator Controller 1. Turbo-V Navigator controller 1. Turbo-V standard rack controller 2. Vent valve 2. Vent valve 3. Vacuum pump shut-off valve (optional) 3. Vacuum pump shut-off valve (optional) 4. System vent valve (optional) 4. -
Seite 48: Connection A - High Vacuum Flange
TECHNICAL INFORMATION Note that the connections can be made only with Connection A – HIGH VACUUM FLANGE the bolt in the lower side. For ISO-K flange connections, fix the two flanges with the clamps as shown in the figure. Attach the units and tighten each one in turn. Re- peat the sequential tightening until the flange faces meet. -
Seite 49: Connection C - Electrical
TECHNICAL INFORMATION Connection C – ELECTRICAL CAUTION To prevent bearing damage, Varian suggests a minimum purge gas flow rate of 10 sccm (0.17 mbar l/s). This value can be exceeded, according to the process requirements. Please contact Var- ian for specific applications. -
Seite 50: Pump Used In Presence Of Magnetic Fields
However if the effect is grater, than the case Vent valve for standard rack controller 969-9843 should be carefully reviewed by Varian’s specialist. Vent valve for Navigator Controller 969-9834 As a matter of fact, in case of high magnetic fields,... -
Seite 51: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Seite 52 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Seite 53 Fax: (82) 2 3452 2451 Korea China Mexico Tel: (82) 2 3452 2452 (dedicated line) Varian Technologies - Beijing Varian, S. de R.L. de C.V. vtk.technical.support@varianinc.com Room 1201, Jinyu Mansion Concepcion Beistegui No 109 No. 129A, Xuanwumen Xidajie Col Del Valle Xicheng District C.P.