Technical Information; Description Of The Turbo-V 81-M; Pump Description - Varian Turbo-V 81-M Bedienungshandbuch

DESCRIPTION OF THE TURBO-V 81-M

The Turbo-V 81-M pump is available in four ver-
sions. The difference among the four versions lies
purely in the high vacuum connection.
The four versions are:
− Model 969-8901 with ISO 63 high vacuum
flange;
− Model 969-8902 with KF 40 NW high vacuum
flange;
− Model 969-8903 with ConFlat 4.5" external di-
ameter high vacuum flange;
− Model 969-8904 with ConFlat 2.75" external
diameter high vacuum flange.

Pump Description

The pump consists of a high frequency motor driv-
ing a turbine fitted with 9 bladed stages and 3
Macrotorr stages. The turbine rotates in an anti-
clockwise direction when viewed from the high
vacuum flange end.
The turbine is made of high-strength aluminium
alloy, machined from a single block.
Model 969-8901
Model 969-8903
Model 969-8902
Model 969-8904
52

TECHNICAL INFORMATION

Proceeding from the high vacuum to the forevac-
uum region, the turbine stages sequence is:
•
1st stage with a blade angle of 40°,
•
2nd stage with a blade angle of 30°,
•
3rd stage with a blade angle of 24°,
•
4th and 5th stages with a blade angle of 18°,
•
6th stage with a blade angle of 14°;
•
7th, 8th and 9th stages with a blade angle of
12°.
The Macrotorr stages are in the form of three
discs.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of
stainless steel. These are supported and accu-
rately positioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding
rotor discs. These are made of aluminium alloy.
During normal operation, the motor is fed with a
voltage of 54 Vac three-phase at 1350 Hz (max).
To reduce losses during start-up to a minimum,
the frequency increases according to a ramp with
a higher initial voltage/frequency ratio.
The pump can be water cooled or air cooled: in the
first case the customer can use a dedicated exter-
nal plate made of nickel-plated brass, in the sec-
ond case an external optional fan is available.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 μm.
The pump can operate in any position and can be
supported on the high vacuum flange. The con-
nection of the forevacuum on the side of the pump
is a KF 16 NW flange.
PUMP
FOREPUMP
CONNECTOR
CONTROLLER
CONNECTOR
87-900-983-01(B)