Varian Turbo-V 81-M Bedienungshandbuch Seite 56

The Turbo-V 81-M pumps must be used in conjunction with one
of the suitable Varian controller and they must be connected to
a primary pump (see "Technical Information").
The available controllers are the following:
- Rack controller 81-AG: 969-8988
- Rack controller 81-AG RS232/485: 969-8989
- Rack controller 81-AG Profibus: 969-8990
- PCB 24 V 969-9538
The Turbo-V 81-M can be installed in any position. Fix the
Turbo-V 81-M in a stable position connecting the inlet flange of
the turbopump to a fixed counter-flange capable of withstanding
a torque of 1000 Nm around its axis.
For example the ISO 63 flange can be fixed using high strength
steel clamps (as Varian model IC 63250 DCMZ).
The following table shows, for each flange dimension, the nec-
essary number of clamps and the relevant fixing torque.
FLANGE FIXING
DEVICE
ISO 63 M10 clamps
M8 claws
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Varian hard-
ware. See the appendix "Technical Information" for a detailed
description.
NOTE
The Turbo-V 81-M cannot be fixed by means of its base.
The Turbo-V 81-M belongs to the second installation (or over-
voltage) category as per directive EN 61010-1. Connect the
device to a mains line that satisfy the above category.
For installation of optional accessories, see "Technical Informa-
tion".
USE
All the instructions to correctly use the turbopump are contained in
the controller manual. Read carefully this manual before use the
pump.
To obtain better limit pressures it is possible to heat the pump.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 120 °C for a ConFlat flange and 80 °C for a
ISO flange.
While heating always use the water cooling.
WARNING!
Never use the turbopump when the inlet flange is not con-
nected to the vacuum chamber or is not blanked.
Do not touch the turbopump or any of its accessories during the
heating process. The high temperatures may cause burns.
Avoid impacts, oscillations or harsh movements of the pump
when in operation. The bearings may become damaged.
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar
(above atmospheric pressure).
For pumping aggressive gases, these pumps are fitted with a spe-
cial port to allow a steady flow of inert gas (like Nitrogen or Helium)
for pump bearing protection (see the appendix "Technical Informa-
tion").
N. FIXING
TORQUE
4 22 Nm
4 11 Nm
CAUTION
CAUTION
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pump in presence of explosive gases.
MAINTENANCE
The Turbo-V 81-M series pumps does not require any mainte-
nance. Any work performed on the system must be carried out
by authorized personnel.
Before carrying out any work on the system, disconnect it from
the mains, vent the pump by opening the appropriate valve,
wait until the rotor has stopped turning and wait until the sur-
face temperature of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service
center who can supply a reconditioned system to replace that
broken down.
Before returning the system to the constructor for repairs, or
replacement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be in-
serted in the system package before shipping.
If a system is to be scrapped, it must be disposed of in accor-
dance with the specific national standards.
Meaning of the "WEEE" logo found in labels
The following symbol is applied in accordance with the EC
WEEE (Waste Electrical and Electronic Equipment) Directive.
This symbol (valid only in countries of the European Com-
munity) indicates that the product it applies to must NOT be
disposed of together with ordinary domestic or industrial waste
but must be sent to a differentiated waste collection system.
The end user is therefore invited to contact the supplier of the
device, whether the Parent Company or a retailer, to initiate the
collection and disposal process after checking the contractual
terms and conditions of sale.
51
INSTRUCTIONS FOR USE
WARNING!
WARNING!
NOTE
DISPOSAL
87-900-983-01(B)