Inhaltsverzeichnis
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Inhaltsverzeichnis
Verwandte Anleitungen für Varian Turbo-V 700HT
Inhaltszusammenfassung für Varian Turbo-V 700HT
- Seite 2 Turbo-V 700HT...
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Seite 5: Inhaltsverzeichnis
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Seite 6: Informazioni Generali
Durante il trasporto e l'immagazzinamento delle pompe non Le pompe turbomolecolari della serie Turbo-V700HT devono devono essere superate le seguenti condizioni ambientali: essere utilizzate solo con uno degli appositi controllori Varian − temperatura: da -20 °C a +70 °C (serie 969-9445, 969-9545, 969-9872) e devono essere colle- −... - Seite 7 In caso di guasto è possibile usufruire del servizio di riparazio- della pompa. Le viti utilizzate devono avere un carico di sner- ne Varian o del "Varian advanced exchange service", che per- vamento di 500 N/mm e devono essere fissate con una cop- mette di ottenere una pompa rigenerata in sostituzione di pia di 3,1 Nm.
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Seite 8: Allgemeines
Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen Mißachtung einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V700HT handelt es sich um Turbomolekularpumpen für Hoch- Ultrahochvakuumanwendungen. Sie eignen sich für jede Art von Gas oder gashaltige Gemische, nicht jedoch zur Förderung... -
Seite 9: Anwendung
Pumpenghehäuse unter 50°C abgesunken ist. “Technical Information”. Wenn die Pumpen über ihr Unterteil installiert werden sollen, Bei einem Defekt kann der Varian Service oder der " advanced müssen in die Bohrungen des Unterteils 3 M6-Schrauben exchange service" in Anspruch genommen werden. -
Seite 10: Indications Generales
Pendant le transport et l'emmagasinage des pompes, il faudra doivent être utilisées qu’avec l’un des contrôleurs spéciaux veiller à respecter les conditions environnementales suivantes: Varian (série 969-9445, 969-9545, 969-9872) et doivent être − température: de - 20°C - à + 70°C connectées à... - Seite 11 "advanced exchange service", remplir et contrôle. faire parvenir au bureau local Varian la fiche "Sécurité et Il est conseillé de lire attentivement cette notice avant d'utiliser Santé" annexée à la présente notice d'instructions. Une copie la pompe.
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Seite 12: Instrucciones De Uso
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Seite 13 En caso de avería se podrá utilizar el servicio de reparación Todas las instrucciones para el funcionamiento correcto de la Varian o el "Varian advanced exchange service", que permite turbobomba se encuentran en el manual de la unidad de obtener una bomba regenerada para sustituir la averiada.
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Seite 14: Instruções Para O Uso
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... - Seite 15 3,1 Nm. Em caso de defeito é possível usufruir do serviço de reparação Para a instalação dos acessórios opcionais, ver "Technical Varian ou do "Varian advanced exchange service", que permite Information". obter uma bomba regenerada que substitua a bomba com defeito.
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Seite 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Seite 17 In geval van storing is het mogelijk om de reparatiedienst van Om de pomp met behulp van zijn basis te bevestigen, zijn drie Varian of de "Varian advanced exchange service" in te schakelen: zo krijgt men een ruilpomp ter vervanging van de M6 bouten nodig die in de gaten in de basis van de pomp worden ingebracht.
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Seite 18: Brugsanvisning
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Seite 19 åbning, hvortil den passive luftart (argon eller Turbomolekulærpumperne i V700HT serien må kun anvendes kvælstof) skal sluttes for at beskytte lejerne. med en af de særlige Varian kontrolapparater (serie 969-9445, 969-9545, 969-9872) og skal forbindes med en primær pumpe (se skemaet i "Technical Information").
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Seite 20: Bruksanvisning
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Seite 21 ädelgas (kväve eller argon) för att skydda lagren (se bilagan Turbomolekylärpumparna i serien V700HT måste användas “Technical information“). med en särskild styrenhet från Varian (serie 969-9445, 969- 9545, 969-9872), och anslutas till en förpump (se schema i " Technical information").
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Seite 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Seite 23 (argon eller kvelstoff) koples for å beskytte lagrene (se Turbo-V700HT serien turbo-molekulære pumper må kun “Teknisk informasjon). brukes med en av de spesielle Varian kontrollere (serie 969- 9445, 969-9545, 969-9872), og må koples til hovedpumpen (se skjema i "Teknisk informasjon").
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Seite 24: Käyttöohjeet
YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä,... - Seite 25 (typpi tai argooni) jotta laakerit ainoastaan niihin sopivien varian valvojien kanssa (sarja 969- suojataan (katso liite “Technical information”). 9445, 969-9545, 969-9872) ja niiden täytyy olla yhdistettyinä pääpumppuun (katso kaaviota osasta "Technical Information"). Turbopumppu voidaan asentaa mihin tahansa asentoon.
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Seite 26: Pdhgies Crhsews
£llh prÒsqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikÿ ÿ merikÿ aq◊thsh twn odhgièn, thn akat£llhlh crÿsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ÿ crÿsh pou den sumfwne∂... - Seite 27 22 Nm Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj el∂kwsh M10 Varian ÿ sto “Varian advanced exchange service”, pou saj d∂nei th H tourmpoantl∂a me fl£ntza eisÒdou ConFlat pr◊pei na sterewqe∂ dunatÒthta na antikatastÿsete thn calasm◊nh antl∂a me m∂a sto q£lamo kenoÚ...
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Seite 28: General Information
See the appendix "Technical In- formation" for detailed information. The notes contain important information taken from the text. The Turbo-V 700HT series pumps must only be used with one of the special Varian controllers (series 969-9445, 969-9545, STORAGE 969-9872) and must be connected to a primary pump (see "Technical Information"). - Seite 29 MAINTENANCE FLANGE FIXING FIXING TORQUE DEVICE The Turbo-V 700HT series pump does not require any mainte- ISO 200 M10 clamps 22 Nm nance. Any work performed on the pump must be carried out M10 claws 22 Nm by authorized personnel.
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Seite 30: Technical Information
TECHNICAL INFORMATION During normal operation, the motor is fed with a DESCRIPTION OF THE TURBOPUMP voltage of 56 Vac three-phase at 700 Hz. To re- The Turbo-V700HT pump is available in two ver- duce losses during start-up to a minimum, the fre- sions which differ only in their inlet flange. -
Seite 31: Technical Specification
ISO: 14 (31) CFF: 20.1 (42.2) Start-up time < 5 minutes Recommended mechanical: Varian SD 450 * According to standard DIN 28 428, the base forepump diaphragm: Varian MD 60 pressure is that measured in a leak-free test dome, Operating position... - Seite 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-878-01(C)
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Seite 33: Inlet Screen Installation
TECHNICAL INFORMATION The screen can be mounted on each pump. INLET SCREEN INSTALLATION The inlet screen can be removed as shown in the following figure. The inlet screens mod. 969-9316 prevents the blades of the pump from being damaged by debris greater than 0.7 mm diameter. -
Seite 34: Heater Band Installation
TECHNICAL INFORMATION Switch on the heater while the turbopump is in op- HEATER BAND INSTALLATION eration. In the event of turbopump overheat, the heater will be automatically cut out by the thermis- tor sensor. NOTE The turbopump must be "baked" only when operat- ing with an inlet pressure less than 10 mbar and with water cooling. -
Seite 35: Water Cooling Kit Installation
TECHNICAL INFORMATION The assembled kit must be screwed into the suit- WATER COOLING KIT INSTALLATION able holes of the pump body with a recommended Two types of water cooling kits are available to be closing torque of 5 Nm. mounted when the pump is used under heavy load conditions or when air cooling is insufficient. -
Seite 36: Air Cooling Kit Installation
TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION Position the fan on the pump, ensuring that the holes in the plate line up with those in the pump base. Insert the respective washers and screws and tighten with a screwdriver. Connect the fan to the controller. A fan kit model 969-9314 is available for air cooling the pump. -
Seite 37: Gas Purge Valve Installation
TECHNICAL INFORMATION GAS PURGE VALVE INSTALLATION VENT VALVE INSTALLATION A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump. To install the gas purge valve it is necessary to un- screw the purge port cover as shown in the follow- ing figure, The vent valve mod. -
Seite 38: Vent Device Installation
TECHNICAL INFORMATION Tighten the valve using a 16 mm. hexagonal span- Unscrew and remove the threaded plug (see figure ner with a torque of 2.5 Nm. below). ! ! ! ! CAUTION Do not overtighten the valve as this may damage the thread on the pump. -
Seite 39: Typical Layout Diagram
Fore-vacuum pump with internal one-way valve For ConFlat flange connections we recommend 10. Fore-vacuum pump control relay using Varian hardware. 11. Connection for water cooling To facilitate assembly and dismantling, apply Fel- pro C-100 high temperature lubricant to the screw 12. -
Seite 40: Connection Configurations
NOTE The Turbo-V 700HT is characterized by its high compression ratio also for oil vapors. When using a mechanical oil-sealed pump, it is advisable to in- stall a suitable trap between the turbopump and the... -
Seite 41: Pump Used With Corrosive Gases
! ! ! ! CAUTION 1. Purge gas line 2. Pressure To prevent bearing damage, Varian suggests a regulator minimum purge gas flow rate of 10 sccm (0.17 3. Gas purge valve mbar l/s). This value can be exceeded, according 4. -
Seite 42: Accessories
300 single phase, universal motor Triscroll Dry Vacuum Pump PTS PTS03003UNIV 300 3 phase, universal motor Vibration damper ISO 200 969-9346 Vibration damper CFF 10” 969-9336 For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. 87-900-878-01(C) -
Seite 43: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Seite 44 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Seite 45 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...