Agilent Technologies 4UHV Gebrauchsanleitung Seite 77

WIN R/W Type
644 R/W N
645 R/W A
800 R N
801 R N
802 R N
803 R A
804 R A
808 R N
809 R N
810 R N
811 R A
812 R A
820 R N
821 R A
822 R A
830 R N
831 R A
832 R A
840 R N
841 R A
842 R A
Agilent 4UHV Ion Pump Controller User Manual
Description
I protect CH4
Set Point CH4
Temperature
FAN
Temperature
HV1
Temperature
HV2
Interlock Status
Status Set Point
Temperature
HV3
Temperature
HV4
V measured CH1
I measured CH1
Pressure CH1
V measured CH2
I measured CH2
Pressure CH2
V measured CH3
I measured CH3
Pressure CH3
V measured CH4
I measured CH4
Pressure CH4
/ 87-900-137-01 (D)
Technical Information
Serial
Range
[1,100] step 1 mA
[X.XE-XX]
[0, 200] °C
[0, 200] °C
[0, 200] °C
(see below)
(see below)
[0, 200] °C
[0, 200] °C
[0, 7000] V ;
step 100 V
[1E-10, 9E-1] A
[X.XE-XX]
[0, 10000] V ;
step 100 V
[1E-10, 9E-1] A
[X.XE-XX]
[0, 10000] V ;
step 100 V
[1E-10, 9E-1] A
[X.XE-XX]
[0, 10000] V ;
step 100 V
[1E-10, 9E-1] A
[X.XE-XX]
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