Contents Contents Istruzioni per l’uso 9 Informazioni generali Immagazzinamento 11 Preparazione per l'installazione 11 Installazione Uso 13 Procedure di uso Manutenzione 17 Smaltimento Gebrauchsanleitung Allgemeines 20 Lagerung Vor der Installation 21 Installation 22 Gebrauch Bedienung 26 Wartung Entsorgung 28 MiniVac Controller User Manual / 87-900-049-01 (H) 5/70...
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Contents Mode d’emploi Indications Generales Preparation pour l'installation Installation 32 Utilisation 33 Procedures d'utilisation 36 Entretien Mise au rebut Instructions for Use General Information 40 Storage Preparation for Installation 41 Installation 42 Use 43 Use Procedure 46 Maintenance Disposal Technical Information 49 Minivac Description 50 Controller Outline Installation 56...
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Contents Maintenance Controller Spares and Accessories Controller to Vacion Pump Cables MiniVac Controller User Manual / 87-900-049-01 (H) 7/70...
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Contents 8/70 MiniVac Controller User Manual / 87-900-049-01 (H)
MiniVac Controller User Manual Istruzioni per l’uso Informazioni generali 10 Immagazzinamento Preparazione per l'installazione 11 Installazione Comandi, Indicatori e Connettori del Controller Procedure di uso 16 Interlock Avvio della pompa 16 Accensione del Controller Avvio della Pompa 17 Arresto della Pompa Manutenzione Smaltimento Traduzione delle istruzioni originali...
Istruzioni per l’uso Informazioni generali Informazioni generali Questa apparecchiatura è destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell'utilizzo dell'apparecchiatura. La Agilent si ritiene sollevata da eventuali responsabilità dovute all'inosservanza totale o parziale delle istruzioni, ad uso improprio da parte di personale non addestrato, ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche.
Istruzioni per l’uso Immagazzinamento Immagazzinamento Durante il trasporto e l'immagazzinamento dei MiniVac devono essere soddisfatte le seguenti condizioni ambientali: temperatura: da -20 °C a +70 °C umidità relativa: 0 – 95 % (non condensante) Preparazione per l'installazione Il controller viene fornito in un imballo protettivo speciale; se si presentano segni di danni, che potrebbero essersi verificati durante il trasporto, contattare l'ufficio vendite locale.
Istruzioni per l’uso Installazione Ogni controller giunge dalla Agilent predisposto per una certa tensione di alimentazione: il modello 929-0190 KINGS type High voltage connector (120 Vac, 50 – 60 Hz) il modello 929-0191 FISCHER type High voltage connector (120 Vac, 50 –...
Istruzioni per l’uso Durante il funzionamento è necessario che siano rispettate le seguenti condizioni ambientali: temperatura: da 0 °C a +45 °C umidità relativa: 0 – 95 % (non condensante). Per il collegamento del controller con la relativa pompa utilizzare il cavo specifico del controller stesso.
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Istruzioni per l’uso Mini Vac Figura 2 Pannello frontale del Controller Led High Load, si accende quando la corrente assorbita dalla pompa raggiunge il valore di 12 mA LED polarità selezionata in uscita Scala tensione in uscita (KV) Interruttore ON/OFF principale Scala grafica a LED Tensione/Corrente LED H.
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Istruzioni per l’uso Figura 3 Pannello posteriore dei Controller Modulo di ingresso dell’alimentazione per il Controller. Comprende il fusibile di protezione, il cambia-tensione, la presa di alimentazione di potenza ed il filtro EMC (non compreso nel blocco presa/cambia- tensione). Connettore di uscita alta tensione per alimentazione pompa (tipo KINGS O FISCHER).
Istruzioni per l’uso Procedure di uso Procedure di uso Interlock L’Interlock è un dispositivo di sicurezza progettato dalla Agilent per proteggere l’operatore dai gravi danni provocati dall’alta tensione presente sul connettore di alimentazione della pompa. L’uso del controller è inteso con cavo alta tensione provvisto di Interlock.
Istruzioni per l’uso Manutenzione Avvio della Pompa La pompa si avvia solo se il controller è acceso e la pompa è connessa al connettore di uscita. Per ulteriori informazioni fare riferimento alla sezione “Technical Information”. Arresto della Pompa Per arrestare la pompa portare in posizione OFF l’interruttore principale posizionato sul pannello frontale.
Istruzioni per l’uso Smaltimento L’unità è settata in fabbrica con polarità di uscita negativa. Per un eventuale NOTA cambio far riferimento al paragrafo “Output Polarity Selection”. Qualora un controller dovesse essere rottamato, procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche. Smaltimento Significato del logo "WEEE"...
MiniVac Controller User Manual Gebrauchsanleitung Allgemeines Lagerung Vor der Installation Installation Gebrauch Steuerungen, Anzeigen und Anschlüsse des Controllers Bedienung Interlock Inbetriebnahme der Pumpe 26 Einschalten des Controllers 26 Pumpenstart 27 Pumpenstopp 27 Wartung Entsorgung Übersetzung der Originalanleitungen 19/70...
Gebrauchsanleitung Allgemeines Allgemeines Dieser Apparat ist für Fachbetriebe bestimmt. Vor Gebrauch sollte der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau lesen. Bei - auch nur teilweiser - Nichtbeachtung der enthaltenen Hinweise, unsachgemäßem Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen und Mißachtung der einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Agilent keinerlei Haftung.
Gebrauchsanleitung Lagerung Lagerung Beim Transport und bei der Lagerung der Controller müssen folgende klimatische Verhältnisse eingehalten werden: Temperatur: von -20 °C bis +70 °C Relative Luftfeuchtigkeit: 0-95 % (nicht kondensierend) Vor der Installation Der Controller wird mit einer speziellen Schutzverpackung geliefert. Eventuelle Transportschäden müssen der zuständigen örtlichen Verkaufsstelle gemeldet werden.
Gebrauchsanleitung Installation Alle Agilent-Controller sind für eine bestimmte Anschlußspannung ausgelegt: das Modell 929-0190 KINGS type High voltage connector (120 Vac, 50 – 60 Hz) das Modell 929-0191 FISCHER type High voltage connector (120 Vac, 50 – 60 Hz) das Modell 929-0290 FISCHER type High voltage connector ...
Gebrauchsanleitung Gebrauch Beim Betrieb müssen folgende Umgebungs-bedingungen eingehalten werden: Temperatur: von +0 °C bis +45 °C Relative Luftfeuchtigkeit: 0 - 95 % (nicht kondensierend). Für den Anschluß des Controllers an die Pumpe muß das zum Controller gehörende Kabel benutzt werden. Andere Anschlüsse und die Installation optionalen Zubehörs ist im Abschnitt “Technical Information”...
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Gebrauchsanleitung Gebrauch Mini Vac Abbildung 2 Bedienfeld der Controller LED Hochlast: geht an, wenn der von der Pumpe absorbierte Strom 12 mA erreicht LED: im Ausgang gewählte Polung Skala Ausgangsspannung (kV) Hauptschalter ON/OFF grafische Skala zur LED Spannung/Strom LED H. V. AN Ausgangsstecker für Strom-proportionales Signal 1 V = 1 mA log Stromskala (mA) 24/70...
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Gebrauchsanleitung Gebrauch Abbildung 3 Rücktafel der Controller Eingangsmodul der Controller-Stromversorgung mit Sicherung, Spannungswahlschalter, Leistungsstecker und EMC-Filter (nicht im Block Stecker/Spannungswahlschalter eingeschlossen). Hochspannungs-Ausgangsstecker zur Pumpenversorgung (Typ KINGS oder FISCHER). Eingangs-/Ausgangsstecker für Signale für Zubehör. Controller-Interlock-Kabel. Interlock-Stecker. Die Einheit ist mit einem Wählschalter für die Leitungsspannung versehen. Für HINWEIS ausführliche Informationen zur Auswahl der Leitungsspannung siehe Abschnitt "INSTALLATION"...
Gebrauchsanleitung Bedienung Bedienung Interlock Interlock ist eine von Agilent entworfene Sicherheits-vorrichtung, um den Bediener vor schweren Schäden zu schützen, die durch die Hochspannung am Stromversorgungsstecker der Pumpe hervorgerufen werden können. Der Controller muss mit dem Hochspannungskabel mit Interlock zum Einsatz kommen. Falls der Auftraggeber bei besonderen Verwendungen auf das Hochspannungskabel mit Interlock verzichten wollen sollte, kann das Interlock-Kabel des Controllers (4) verwendet werden.
Gebrauchsanleitung Wartung Pumpenstart Die Pumpe startet nur, wenn der Controller eingeschaltet und die Pumpe am Ausgangsstecker angeschlossen ist. Weitere Informationen finden sich im Abschnitt “Technical Information”. Pumpenstopp Zum Stoppen der Pumpe muß der Hauptschalter auf dem Bedienfeld auf OFF gesetzt werden. Wartung Die Controller der MiniVac Serie brauchen keinerlei Wartung.
Gebrauchsanleitung Entsorgung Fabrikseitig ist die Einheit mit negativer Ausgangspolung eingestellt. Soll das HINWEIS geändert werden, den Absatz “Output Polarity Selection” zu Rate ziehen. Eine eventuelle Verschrottung muß unter Einhaltung der einschlägigen landesüblichen Vorschriften erfolgen. Entsorgung Bedeutung des "WEEE" Logos auf den Etiketten. Das folgende Symbol ist in Übereinstimmung mit der EU-Richtlinie WEEE (Waste Electrical and Electronic Equipment) angebracht.
MiniVac Controller User Manual Mode d’emploi Indications Generales 30 Emmagasinage Preparation pour l'installation 31 Installation Utilisation Commandes, Indicateurs et Connecteurs du Contrôleur 33 Procedures d'utilisation Interlock Démarrage de la pompe 36 Mise sous tension du Contrôleur 36 Mise en marche de la Pompe Arrêt de la Pompe 37 Entretien Mise au rebut...
Mode d’emploi Indications Generales Indications Generales Cet appareillage a été conçu en vue d'une utilisation professionnelle. L'utilisateur doit lire attentivement cette notice d'instructions ainsi que toute autre indication supplémentaire fournie par Agilent, avant l'utilisation de l'appareil. Agilent décline toute responsabilité quant au: non-respect total ou partiel des instructions pour l’utilisation, mauvais usage par du personnel non formé, opérations non autorisées usage contraire aux réglementations nationales...
Mode d’emploi Preparation pour l'installation Emmagasinage Pendant le transport et l'emmagasinage des Mini Vac contrôleurs, il faudra veiller à respecter les conditions environnementales suivantes: Température: de - 20 °C à + 70 °C Humidité relative: 0 – 95 % (non condensante). ...
Mode d’emploi Installation Chaque contrôleur est fourni par Agilent prééquipé pour une certaine tension d'alimentation: Modèle 929-0190 KINGS type High voltage connector (120 Vac, 50 – 60 Hz) Modèle 929-0191 FISCHER type High voltage connector (120 Vac, 50 – 60 Hz) Modèle 929-0290 FISCHER type High voltage connector ...
Mode d’emploi Utilisation Pendant le fonctionnement, il est nécessaire de respecter les conditions environnementales suivantes: Température: 0 °C à + 45 °C Humidité relative: 0 – 95 % (non condensante). Pour la connexion du contrôleur à la pompe correspondante, utiliser le câble du contrôleur prévu à...
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Mode d’emploi Utilisation Mini Vac Figure 2 Tableau avant du Contrôleur Led High Load, (charge élevée) il clignote quand le courant consommé par la pompe atteint la valeur de 12 mA LED polarité sélectionnée à la sortie Echelle de courant à la sortie (KV) Interrupteur ON/OFF principal Échelle graphique à...
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Mode d’emploi Utilisation Figure 3 Tableau arrière des Controleurs Module d’entrée de l’alimentation du Contrôleur. Il est doté du fusible de protection, du dispositif de changement de tension, de la prise d’alimentation en puissance et du filtre EMC (qui n’est pas compris dans le bloc prise/dispositif de changement de tension).
Mode d’emploi Procedures d'utilisation Procedures d'utilisation Interlock L’Interlock est un dispositif de sécurité conçu par Agilent pour protéger l’opérateur contre les sérieux dommages provoqués par la présence de haute tension au niveau du connecteur d’alimentation de la pompe. Il est entendu que le câble de haute tension du contrôleur est équipé de l’Interlock.
Mode d’emploi Entretien Mise en marche de la Pompe La pompe démarre uniquement si le contrôleur est allumé et la pompe est reliée au connecteur de sortie. Pour d’ultérieurs renseignements se référer à la section “Technical Information”. Arrêt de la Pompe Pour arrêter la pompe, mettre l’interrupteur principal situé...
Mode d’emploi Mise au rebut L’unité est assignée à l’usine avec polarité de sortie négative. Pour un NOTE changement éventuel, se référer au paragraphe “Output Polarity Selection”. Si un contrôleur doit être mis au rebut l’éliminer conformément aux réglementations nationales en la matière. Mise au rebut Signification du logo "WEEE"...
MiniVac Controller User Manual Instructions for Use General Information Storage Preparation for Installation 41 Installation Controller Controls, Indicators and Connectors 43 Use Procedure Interlock Start-Up of the Pump Controller Start-up 46 Starting the Pump 47 Pump Shutdown Maintenance Disposal Original Instructions 39/70...
Instructions for Use General Information General Information This equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment. Agilent will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper use by untrained persons, non-authorised interference with the equipment or any action contrary to that provided for by specific national standards.
Instructions for Use Storage Storage When transporting and storing the MiniVacs, the following environmental requirements should be satisfied: temperature: from -20 °C to + 70 °C relative humidity: 0 – 95 % (without condensation) Preparation for Installation The controller is supplied in a special protective packing. If this shows signs of damage which may have occurred during transport, contact your local sales office.
Instructions for Use Installation Each controller is factory set for a specific power supply: Model 929-0190 KINGS type High voltage connector (120 Vac, 50 – 60 Hz) Model 929-0191 FISCHER type High voltage connector (120 Vac, 50 – 60 Hz) Model 929-0290 FISCHER type High voltage connector ...
Instructions for Use During operation, the following environmental conditions must be respected: temperature: from 0 °C to +45 °C relative humidity: 0 – 95 % (without condensation) To connect the controller to the pump use the specific cable supplied with the controller.
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Instructions for Use Mini Vac Figure 2 Controller Front Panel High Load LED, comes on when the current absorbed by the pump reaches 12 mA Output selected polarity LED Output voltage scale (KV) Main ON/OFF switch Voltage/current LED scale H.V. LED ON Output connector of the sSignal proportional to the current 1 V= 1 mA log Current scale (mA)
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Instructions for Use Figure 3 Controller Rear Panel Input module for the controller power supply. It includes the protection fuse, the voltage changer, the power supply plug, and the EMC filter (not included into the plug/voltage switch assembly). High voltage output connector for the pump (KINGS or FISCHER type) power supply.
Instructions for Use Use Procedure Use Procedure Interlock The Interlock is a safety device designed by Agilent to protect the operator against serious injury caused by the high voltage present on the pump power connector. The controller is intended to be used with a HV cable furnished with Interlock.
Instructions for Use Maintenance Starting the Pump The pump is activated only if the controller is powered on and the pump itself is connected to the output connector. For further information refer to the “Technical Information” section. Pump Shutdown To shutdown the pump, turn the main switch placed on the front panel to OFF.
Instructions for Use Disposal The unit is factory set with a negative output polarity. Refer to the section NOTE “Output Polarity Selection” for instructions on how to change the output polarity. If a pump is to be scrapped, it must be disposed of in accordance with the specific national standards.
Technical Information Minivac Description Minivac Description The MiniVac controller is a quarter rack solid state power supply with self protection features, which generates high voltage using high frequency switching technology. The MiniVac ion pump controller is designed to operate any type of ion pumps: Diode, Differential Diode, Triode and StarCell.
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Technical Information Minivac Description Figure 4 MiniVac Controllers MiniVac Controller User Manual / 87-900-049-01 (H) 51/70...
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Technical Information Minivac Description The MiniVac controller front panel controls are shown in the following figure.7 Mini Vac Figure 5 MiniVac Front Panel Controls High Load LED lights up when the pump current is higher than 12 mA. Output polarity LEDs selection indicators. Voltage output scale (kV).
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Technical Information Minivac Description The MiniVac controller rear panel controls are shown in the following figure. Figure 6 MiniVac Controller Rear Panel Controls Input module for the controller power supply. It includes the protection fuse, the voltage changer, the power supply plug, and the EMC filter (not included into the plug/voltage switch assembly).
Technical Information Minivac Description Controller Specifications Tab. 1 Operation All type and size of VacIon pump Input: Voltage 100 Vac (4 ranges) 120 Vac 220 Vac 240 Vac Frequency 50 to 60 Hz Power 50 VA Fuse ...
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Technical Information Minivac Description Safety EN 61010-1 Installation category Pollution degree Output connector: FISCHER type: part number 105 A049 High voltage for model 929-0290 and 929-0191 KINGS type: part number 1064-1 for model 929-0190 and 929-0291 Accessory J 001 input/output signal (9-pin "D"...
Technical Information Controller Outline Controller Outline The outline dimensions of the MiniVac controller are shown in the following figure. Figure 8 MiniVac Outline Dimensions Installation Inspect the controller for any shipping damage. Models 929-0190 and 929-0191 are factory set for ...
Technical Information Installation WARNING! The MiniVac controller is equipped with a 3-wire power cord and plug (internationally approved) for user's safety. Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock. High voltage developed in the controller can cause severe injury or death. Before servicing the unit, disconnect the input power cable.
Technical Information Installation Output Polarity Selection The output polarity is selected by the high voltage multiplier card, and is factory set for negative output voltage polarity. If a change in output polarity is desired, proceed as follows: Switch off the power and unplug the power cord from the controller rear panel socket.
Technical Information Installation Input/Output Interconnections All input/output signals are accessible at J001 accessory connector. With the provided P001 mating connector make the connections with AWG 24 (0.2 mm ) - or smaller wire - to the pins indicated in the following figure to obtain the desired capability.
Technical Information Installation Figure 10 P001 Mating Connector and J001 Accessory Connector Pump Connection The pump is connected to the controller rear panel via the high voltage connector by a coaxial high voltage cable assembly. WARNING! High voltage can cause severe injury or death. ...
Technical Information Operation Operation Make all vacuum manifold and electrical connections and refer to the ion pump instruction manual prior to operating the MiniVac controller. The accessory P001 connector should be left in position including the jumper NOTE between pin 3 and 7 if no external connection has been made. For small ion pumps, up to 8 l/s: with a roughing pump, establish a rough pressure suitable to start the ion pump.
Technical Information Operation Pressure Determination Pressure at the inlet flange of a VacIon pump is proportional to the current drawn by the pump. To determine the pressure of the inlet flange of the VacIon pump, determine the pump current displayed on the front panel or read the recorder output (especially for current lower than 1 mA), and find the corresponding pressure value from the current vs pressure curve of the relevant VacIon pump.
Technical Information Maintenance Maintenance Replacement controllers are available on advance exchange basis through Agilent service/sales organization. WARNING! High voltage in the controller can cause severe injury or death. Before servicing, turn power off and remove the power cable. Troubleshooting No current/voltage LED bar graph lit with mains power ON. Verify mains connections and power fuses ...
Technical Information Controller Spares and Accessories Controller Spares and Accessories Tab. 2 Description Part number Mating accessory connector P001 03-648487 Fuse T 2A (5x20 mm) Rack adapter 969-9191 Mains cable 120 Vac USA plug 03-660441-02 Mains cable 220 Vac uropean plug 03-660441-01 Controller to Vacion Pump Cables Tab.
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Request for Return Form Sales and Service Offices United States India Southeast Asia Agilent Technologies Agilent Technologies India Pvt. Ltd. Agilent Technologies Sales Sdn Bhd Vacuum Products Division Vacuum Products Division Vacuum Products Division 121 Hartwell Avenue G01. Prime corporate Park, Unit 201, Level 2 uptown 2, Lexington, MA 02421 - USA Tel.: +1 781...