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Operation; Switching Off; Airing - LEYBOLD TURBOVAC Gebrauchsanleitung

Turbo-molekularpumpen mit fettgeschmierten lagern
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Fig. 9 Curves showing the pressure rise

3.3 Operation

Avoid sudden changes of attitude, extreme outside vi-
brations and shock to the pump during operation.

3.4 Switching off

Switch off the
TURBOVAC
Refer to the
TURBOTRONIK
details.
Switch off the forevacuum pump.
Air the
before it has come to a full standstill;
TURBOVAC
refer to Section 3.5.
In
pumps the built-in anti-suckback valve will
TRIVAC
close automatically and shut off the forevacuum line.
When using forevacuum pumps without an anti-suck-
back valve, close the valve in the forevacuum line.
Close off the cooling water supply or switch off the ven-
tilation immediately after switching off the
order to avoid condensate formation in the pump.
GA 05.118/8 - 05/2001
3
10
mbar
2
10
10
1
-1
10
-2
10
0
5
at the
.
TURBOTRONIK
operating instructions for
TURBOVAC
TURBOVAC 50
TURBOVAC 151, 361
TURBOVAC 600, 1000
10
15
20
Time
If the pump previously handled corrosive gases, it will be
necessary to purge the pump with dry nitrogen for one
hour prior to shut-down. When the system is not in oper-
ation, ensure that neither ambient air nor cleaning
agents can enter the

3.5 Airing

Air the
TURBOVAC
prevent any return diffusion of oil fumes out of the fore-
vacuum-line and into the high-vacuum section.
Use dry nitrogen, for instance, for airing purposes.
There are several methods which may be used to air the
:
TURBOVAC
1.
(C versions only) In processes requiring purge gas,
the pump will have to be vented through the purge
gas valve when it is shut off.
If the vacuum chamber is vented additionally with
purge gas, the bypass valve in the purge gas and
in
airing valve will have to be opened beforehand or
simultaneously. Only in this way will a higher pres-
sure be maintained in the motor chamber than in the
forevacuum chamber, avoiding damaging return dif-
fusion of corrosive gases.
25
30
s
.
TURBOVAC
each time it is shut down in order to
Operation
33

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