Vent Device Installation; Vibration Isolator Installation; Typical Layout Diagram - Varian Turbo-V 150HT Bedienungshandbuch

VENT DEVICE INSTALLATION

The vent device mod. 969-9831 allows to avoid
undesired venting of the pump during a temporary
power failure (adjustable time up to 36 min.), and
enables an automatic vent operation.
Unscrew and remove the threaded plug (see figure
below).
Screw the flange mod. 969-9108 on the pump, tak-
ing care of the o-ring right position.
Assemble the seal ring and lock the vent device in
position using the KF klamp.
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TECHNICAL INFORMATION

VIBRATION ISOLATOR INSTALLATION

Two vibration isolators for ISO and CFF inlet flange
version pumps are available as accessories.
The two model part numbers are the following:
− model 969-9332 for CFF 6" flange;
− model 969-9342 for ISO 100 flange.
They typically reduce the vibration transmitted from
the Turbo-V 150HT pump to the system by a factor
of 20.
Please refer to the relevant instruction manual.

TYPICAL LAYOUT DIAGRAM

1. Turbo-V controller
2. Vent valve
3. Vacuum pump shut-off valve (optional)
4. System vent valve (optional)
5. Vacuum chamber
6. Ionisation gauge
7. Fore-vacuum pump connecting flange
8. Oil mist eliminator
9. Fore-vacuum pump with internal one-way
valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
14. Flexible connection
32 87-900-891-01(C)