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Vent Device Installation; Vent Valve Installation - Varian 969-9084 Serie Bedienungshandbuch

Turbomolekularpumpen
Vorschau ausblenden Andere Handbücher für 969-9084 Serie:
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VENT DEVICE INSTALLATION

The vent device mod. 969-9831 allows to avoid
undesired venting of the pump during a temporary
power failure (adjustable time up to 36 min.), and
enables an automatic vent operation.
Unscrew and remove the threaded plug (see figure
below).
Screw the flange mod. 969-9108 on the pump, tak-
ing care of the o-ring right position.
Assemble the seal ring and lock the vent device in
position using the KF klamp.

VENT VALVE INSTALLATION

The vent valve mod. 969-9843 allows to avoid un-
desired venting of the pump during a temporary
power failure (5 sec maximum), and enables an
automatic vent operation.
Unscrew the threaded plug (see figure below).
Screw the vent valve into the pump without insert-
ing the supplied adapter between the valve and
the pump.
Tighten the valve using a 16 mm. hexagonal span-
ner with a torque of 2.5 Nm.
!
Do not overtighten the valve as this may damage
the thread on the pump.
57
TECHNICAL INFORMATION
CAUTION
87-900-969-01(B)

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Diese Anleitung auch für:

969-9059 serieTurbo-v 2000ht

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