Varian Turbo-V 81 PCB 24 Vdc Bedienungshandbuch Seite 69

FAILURE REPORT
TURBO PUMPS and TURBOCONTROLLERS
Does not start
Does not spin freely
Does not reach full speed
Mechanical Contact
Cooling defective
TURBOCONTROLLER ERROR MESSAGE:
ION PUMPS/CONTROLLERS
Bad feedthrough
Vacuum leak
Error code on display
Customer application:
LEAK DETECTORS
Cannot calibrate
Vacuum system unstable
Failed to start
Customer application:
PRIMARY PUMPS
Pump doesn't start
Doesn't reach vacuum
Pump seized
Customer application:
(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):
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Request for Return
POSITION
Noise
Vibrations
Leak
Overtemperature
......................
Poor vacuum
High voltage problem
Other
No zero/high backround
Cannot reach test mode
Other
Noisy pump (describe)
Over temperature
Other
FAILURE DESCRIPTION
PARAMETERS
Power:
Vertical
Current:
Horizontal
Temp 1:
Upside-down
Other: Temp 2:
OPERATION TIME:
VALVES/COMPONENTS
Main seal leak
Solenoid failure
Damaged sealing area
Customer application:
INSTRUMENTS
Gauge tube not working
Communication failure
Error code on display
Customer application:
DIFFUSION PUMPS
Heater failure
Doesn't reach vacuum
Vacuum leak
Customer application:
Rotational Speed:
Inlet Pressure:
Foreline Pressure:
Purge flow:
Bellows leak
Damaged flange
Other
Display problem
Degas not working
Other
Electrical problem
Cooling coil damage
Other