INFICON LDS3000 Originalbetriebsanleitung Seite 96

9 | Erweiterungsmodul nutzen (LDS3000, LDS3000 AQ)
LDS2010 Analog
Einstell. Ausgang
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Funktion LDS2010
Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-7 mbar l/s
Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-7 mbar l/s
Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-8 mbar l/s
Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-8 mbar l/s
Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-9 mbar l/s
Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-9 mbar l/s
Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-10 mbar l/s
Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-10 mbar l/
s
Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-11 mbar l/s
Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-11 mbar l/
s
Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1 mbar l/s
Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-3 mbar l/s
Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-1 mbar l/s
Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-4 mbar l/s
Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-2 mbar l/s
Funktion
LDS3000
Leckrate
log.
Leckrate
log.
Leckrate
log.
Leckrate
log.
Leckrate
log.
Leckrate
log.
Leckrate
log.
Leckrate
log.
Leckrate
log.
Leckrate
log.
Leckrate
linear
Leckrate
log.
Leckrate
linear
Leckrate
log.
Leckrate
linear
LDS3000(AQ)-MSM-Bedienungsanleitung-jiqa54de1-10-(1911)
INFICON
Skalierung Obere Grenze
der Leckrate (10 V = ...)
2 V/Dek. 1E-2 mbar l/s
Spezial 1 1E-3 mbar l/s
2 V/Dek. 1E-3 mbar l/s
Spezial 1 1E-4 mbar l/s
2 V/Dek. 1E-4 mbar l/s
Spezial 1 1E-5 mbar l/s
2 V/Dek. 1E-5 mbar l/s
Spezial 1 1E-6 mbar l/s
2 V/Dek. 1E-6 mbar l/s
Spezial 1 1E-7 mbar l/s
unrelevant 1E1 mbar l/s
1 V/Dek. 1E7 mbar l/s
unrelevant 1E0 mbar l/s
1 V/Dek. 1E6 mbar l/s
unrelevant 1E-1 mbar l/s