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Offset
Size
Unit
Byte
Byte
Res
18
1
19
1
20
1
Range
-10 - +10
Setpoint 2 Pressure Value Exponent
Set the exponent of the exponential value of the R2
setpoint (format X.XE-XX) when it is used for pressure
monitoring (Parameter Buffer, Offset 20, B
B
= Stop Speed Reading
0
This function measures the pump speed after a stop
command.
0 = Off
1 = On
B
= Active Stop
1
This function brakes the pump after a stop command, by
using the motor as a generator.
0 = Off
1 = On
B
- Reserved
2
B
= Start/Stop/Interlock Mode
3-4
Change the logic of Start/Stop and Interlock inputs.
Ask to Varian personnel for this option
B
= Vent & Purge Auto/Man
0
0 = Auto (the controller drives purge and vent valves
automatically)
1 = Manual (the user can command the valves by serial
line or profibus )
B
= Gas Load Type
1
Select here the gas load
0 = Ar
1 = N
2
B
– Interlock Type
2
0 = continuos (the interlock must be always present to
run the pump)
1 = at start (the interlock must be present only at start
command)
B
= Setpoint R1 Logic
3
0 = active close (NO)
1 = active open (NC)
B
= Setpoint R2 Logic
4
0 = active close (NO)
1 = active open (NC)
B
= Pressure Unit
5-6
0 = mbar
1 = Pascal
2 = Torr
B
= Reserved
7
100
Description
= 4).
3-5
WIN Serial
176
167
107
151
125
157
110
104
174
163
87-900-982-01 (C)
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