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TECHNICAL SPECIFICATION
Pumping speed
N
: 6000 l/s
2
He: 7000 l/s
H
: 6500 l/s
2
Compression ratio
N
: >1 x 10
2
He: 2 x 10
H
: 7 x 10
2
Base pressure*
5 x 10
Inlet flange
ISO 500
20" I.D. Wheeler
Foreline flange
ISO 100
Vent port flange
KF 10 NW
Rotational speed
14000 rpm
Start-up time
30 minutes
Recommended
Varian SD 1400
forepump
Operating position
Vertical (max slope 10°)
Operating ambient
+ 5° C to + 35° C
temperature
9
5
3
-10
-10
mbar (4 x 10
Torr)
Coolant water
(minimum characteris-
tics)
Bakeout temperature
Vibration level
(displacement)
Noise level
Input
Lubricant type
Lubricant charge
Storage temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test dome
bake-out, using the recommended forepump.
26
TECHNICAL INFORMATION
flow: 100 l/h (0.45 GPM)
temp.: + 10° C to + 25° C
pressure: 2 to 4 bar
(30 to 60 Psi)
120° C at inlet flange
maximum
< 0.05 µm at inlet flange
≤ 55 dB (A) at 1 meter
100 Vac, three phase, 233 Hz
Varian T.A. oil
3
1000 cm
- 20° C to + 70° C
250 (550)
87-900-838-01(B)
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