Inhaltsverzeichnis
Werbung
TECHNICAL SPECIFICATION
Pumping speed
N
: 950 l/s
2
He: 870 l/s
H
: 900 l/s
2
Compression ratio
N
: >1 x 10
2
He: 5 x 10
H
: 2 x 10
2
Base pressure*
minimum with recommended
mechanical forepump:
< 1 x 10
minimum with recommended
diaphragm forepump:
2 x 10
Inlet flange
CFF 10" O.D.
ISO 200
Foreline flange
KF 40 NW
Rotational speed
38000 RPM
Start-up time
< 4 minutes
Recommended
mechanical: Varian SD 450
forepump
diaphragm: Varian MD 60
Operating position
any
Cooling
Forced air or water
requirements
Operating ambient
+ 5° C to + 35° C
temperature
10
7
6
-10
-10
mbar (< 1 x 10
Torr)
-9
-9
mbar (1.5 x 10
Torr)
Coolant water
Bakeout temperature
Vibration level
(displacement)
Noise level
Input
Lubricant
Storage temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
26
TECHNICAL INFORMATION
minimum flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 20° C
pressure: 3 to 5 bar (45 to 75 Psi)
120° C max. at inlet flange (CF
flange)
80° C max. at inlet flange (ISO
flange)
< 0.01 µm at inlet flange
≤ 45 dB (A) at 1 meter
56 Vac, three phase, 633 Hz
permanent lubrication
- 20° C to + 70° C
ISO 200: 19 (41.8)
CFF 10": 26 (57.2)
87-900-892-01(D)
Werbung
Inhaltsverzeichnis
