Input signals
Digital INPUT1
Bit
bit 0
bit 1
Bit 2-4
bit 5
Bit 6-7
bit 8
bit 9
bit 10
bit 11
bit 12
bit 13
Bit 14-15
Digital INPUT2
Bit
Bit 0-7
Bit 8-14
bit 15
Analog INPUT1
Bit
Bit 0-15
Analog INPUT2
Bit
Bit 0-15
Analog INPUT3
Bit
Bit 0-7
Bit 8-15
Analog INPUT4
Bit
Bit 0-7
Bit 8-15
BIAS 300 Plasma function
Start
Control ready
spare
spare
spare
spare
spare
spare
Reset error
Arc detection on
Bus communication OK
spare
BIAS 300 Plasma function
Sensitiveness
spare
spare
BIAS 300 Plasma function
Current command value, resolution: 0.1 A
BIAS 300 Plasma function
Current command value, resolution: 0.1 V
BIAS 300 Plasma function
spare
I
1, resolution: 0 - 75 A
OFFSET
BIAS 300 Plasma function
spare
I
1, resolution: 0 - 75 A
OFFSET
18
Remarks
High active
High active
must be 0
must be 0
must be 0
must be 0
must be 0
must be 0
High active
High active
Any
must be 0
Remarks
See table: „Sensitiveness"
must be 0
must be 0
Remarks
I
= 60 A with BIAS 300 Plasma
max
Remarks
U
= 300 V with BIAS 300 Plasma
max
Remarks
-
0 = deactivated, 1 - 200 A
Remarks
-
0 = deactivated, 1 - 100 A