Reset Command; Operating The Pump - Varian Turbo-V 70 Bedienungshandbuch

Select the run-up time according to the chamber
volume and/or operating cycle feature by pressing
the CYCLE NUMBER push-button to select the
desired number, then press the PUMP CURRENT
push-button to enter the data.
The run up time is factory-set to:
00h 08m 00s.
When the last digit is entered, the display will be as
shown in the following figure.
D E L A Y E V E N
T H R E S H O L D :
where:
XXX = YES or NO.
By pressing the CYCLE NUMBER push-button, select
YES or NO.
If YES is selected, R2 energizes from the start of the
turbopump and deenergizes after the run-up time when
the pump rotational speed becomes lower than the
programmed speed threshold value.
If NO is selected, R2 energizes from the start of the
turbopump and - after the rotational speed of the pump
exceeds for the first time - the speed threshold value
the R2 deenergizes once the pump speed becomes
lower than the programmed speed threshold value.
The function is factory-set to YES.
After selection, press PUMP CURRENT to confirm; the
display will be as shown in the following figure.
C O N T R O L L E R
W H E N R 2
where:
XXX = YES or NO.
A F T E R
X X X
O F F
O F F : X X X
If YES is selected when R2 deenergizes the controller,
and the interconnecting devices are automatically
switched off.
This function is factory set to YES.
After selection, press PUMP CURRENT to confirm; the
display will be as shown in the following figure.

Reset Command

•
The display shows:
P U M P L
R E S E T ?
where:
•
PUMP LIFE = is the elapsed operating time range
000 to 99999 hours.
•
RESET XXX = YES or NO.
If YES is selected, the pump life shall be reset to 000.
After selecting YES, press the PUMP CURRENT push-
button to enter the command and the display shows as
follows.
When PUMP LIFE is reset to 000, the CYCLE number
is also reset to 000.

Operating the Pump

After the starting period, if the system has a vacuum
leak or the pressure in the pump/chamber is high (from
1 mbar to atmosphere), the pump continues to operate
indefinitely.
If the gas load at the turbopump inlet flange continues
to stay high, the power drawn by the turbopump
increases up to the maximum value. Than the Turbo-V
pump is slowed down in proportion to the gas load at
least until it reaches about 9 KRPM.
This will occur either in NORMAL operation or with the
LOW SPEED selected.
As soon as the gas load decreases, the pump will
automatically accelerate to reach normal operation.
The pump can be stopped at any rotational speed and
can be restarted at any rotational speed from either the
front panel buttons or the remote connections.
The controller automatically synchronizes the output to
the rotational speed of the pump and then accelerates
linearly up to the nominal speed or within steps if the
Soft Start has been selected.
57
TECHNICAL INFORMATION
I F E X X X X X h
X X X
NOTE
87-900-870-01 (B)