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N.
Read/
Data
Description
Write
Type
157
R/W
L
Gas load
type
167
R/W
L
Stop Speed
Reading
200
R
N
Pump
current
201
R
N
Pump
voltage
202
R
N
Pump power
consumption
203
R
N
Driving fre-
quency in
Hz
204
R
N
Pump tem-
perature
205
R
N
Pump status
206
R
N
Error code
211
R
N
Controller
temperature
n. 1
216
R
N
Pump body
temperature
222
R
N
Controller
temperature
n. 2
223
R
N
Flow meter
reading
300
R
N
Cycle time
in minutes
(zeroed by
the reset
command)
301
R
N
Cycle num-
ber (zeroed
by the reset
command)
302
R
N
Pump life in
hours (ze-
roed by the
reset com-
mand)
303
R
N
High Power
Start cycles
number
310
Reserved to Varian service
to
399
Admitted
N.
Values
0 = Ar
400
1 = N
2
(default = 1)
402
0 = NO
1 = YES
(default = 0)
502
mA
503
V
504
W
Hz
°C
TOO HIGH LOAD
Stop = 0
Waiting intlk = 1
Starting = 2
Auto-tuning = 3
Braking = 4
Normal = 5
Fail = 6
Bit description:
see the following
MONITORR
figure
An integrated MoniTorr card is suitable for the
Turbo-V 3K-G. This feature allows the pump's vi-
°C
bration spectra acquisition and download. The
necessary hardware is totally integrated into the
controller and consists of one PCB card and one
°C
accelerometer fixed on the controller's side.
°C
sccm
0 to 999999
0 to 9999
The MoniTorr card allows to:
• perform programmed maintenance on the tur-
0 to 999999
• continuously monitor the turbopump operating
• identify the wear conditions of one or two bear-
92/107
TECHNICAL INFORMATION
Read/
Data
Description
Write
Type
R
A
CRC
EPROM
(QE)
R
A
CRC Pa-
ram. (PA)
Reserved to Varian service
R/W
N
RS 485 ad-
dress
R/W
L
Serial type
select
7
6
5
4
3
SHORT CIRCUIT
OVERVOLTAGE
VERIFY LINE SELECT
Window N. 206 Bit Description
bopump
conditions
ings.
Admitted
Values
QE5XXXX
(where "XXXX"
are variable)
PA5XXXX
(where "XXXX"
are variable)
0 to 31
(default = 0)
0 = RS 232
1 = RS 485
(default = 0)
2
1
0
NO CONNECTION
PUMP OVERTEMP.
CONTROLL. OVERTEMP.
POWER FAIL
87-901-011-01
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