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Varian TV 301 Bedienungshandbuch

Pump models: 969-8918 969-8919 969-8920 969-8921 kit models: 969-8824 969-8825 969-8826 969-8827 969-8828 969-8829 969-8830 969-8831 controller model: 969-8972 969-8973
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Pump models:
969-8918
969-8920
Kit models:
969-8824
969-8826
969-8828
969-8830
Controller model:
969-8972
87-900-946-01(B)
MARCH 2003
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TV 301
Navigator
969-8919
969-8921
969-8825
969-8827
969-8829
969-8831
969-8973
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MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL

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Verwandte Anleitungen für Varian TV 301

Inhaltszusammenfassung für Varian TV 301

  • Seite 1 MANUALE DI ISTRUZIONI TV 301 BEDIENUNGSHANDBUCH Navigator NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES Pump models: MANUAL DE INSTRUÇÕES 969-8918 969-8919 BEDRIJFSHANDLEIDING 969-8920 969-8921 INSTRUKSTIONSBOG Kit models: 969-8824 969-8825 BRUKSANVISNING 969-8826 969-8827 INSTRUKSJON MANUAL 969-8828 969-8829 OHJEKÄSIKIRJA 969-8830 969-8831 ODHGIES CRHSEWS...
  • Seite 2 TV 301 Navigator Downloaded from www.Manualslib.com manuals search engine...
  • Seite 3 Downloaded from www.Manualslib.com manuals search engine...
  • Seite 4 Downloaded from www.Manualslib.com manuals search engine...

  • Seite 5: Inhaltsverzeichnis

    BRUGSANVISNING ...........................13 BRUKSANVISNING............................15 BRUKERVEILEDNING ..........................17 KÄYTTÖOHJEET ............................19 PDHGIES CRHSEWS .............................21 INSTRUCTIONS FOR USE ........................23 TECHNICAL INFORMATION........................25 DESCRIPTION OF THE TV 301 NAVIGATOR ...............25 Pump Description......................25 Controller Description....................26 TECHNICAL SPECIFICATION....................26 TV 301 NAVIGATOR OUTLINE ....................27 INTERCONNECTIONS......................30 P3 - Vent........................30 P4 – External fan ......................30 J5 - IN-OUT ........................30...

  • Seite 6: Informazioni Generali

    Durante l'operazione di disimballaggio, prestare particolare atten- zione a non lasciar cadere il TV 301 Navigator e a non sottoporlo ad urti o vibrazioni. Non disperdere l'imballo nell'ambiente. 87-900-946-01(B) Downloaded from www.Manualslib.com...
  • Seite 7 ISTRUZIONI PER L'USO Il TV 301 Navigator deve essere collegato ad una pompa primaria (ve- dere schema in "Technical Information"). Il TV 301 Navigator può essere installato in qualsiasi posizione. Fissare PERICOLO! il TV 301 Navigator in posizione stabile collegando la flangia di ingresso...

  • Seite 8: Allgemeine Informationen

    Um Entgasungen zu vermeiden, dürfen die Teile, die mit dem nimmt die Firma Varian keinerlei Haftung. Vakuum in Berührung kommen, nicht mit den bloßen Händen Modell TV 301 Navigator ist ein integriertes System, das aus einer angefaßt werden. Es sind stets Schutzhandschuhe oder andere Turbomolekularpumpe für...

  • Seite 9: Wartung

    (siehe Abschnitt "RS 232 COMMUNICATION DESCRIPTION" im Anhang "Technical Information"). HINWEIS Die grüne LED LD1 an der Bodenplatte von Modell TV 301 gibt mit der Modell TV 301 Navigator kann nicht mittels seines Sockels befes- Häufigkeit ihres Blinkens die Betriebsbedingungen des System an: tigt werden.

  • Seite 10: Indications Generales

    Pendant l'opération d'ouverture de l'emballage, veiller tout particu- lièrement à ne pas laisser tomber le TV 301 Navigator et à ne lui faire subir aucun choc et aucune vibration. 87-900-946-01(B) Downloaded from www.Manualslib.com...
  • Seite 11 à vide à l'aide des éléments mécaniques Varian prévus à cet "Technical Information"). effet. Pour tout autre détail, se reporter à l'appendice "Technical La LED verte LD1 placée sur le panneau de la base du TV 301 Information". indique, par sa fréquence de clignotement, les conditions opéra- tionnelles du système:...

  • Seite 12: Información General

    Durante la operación de desembalaje, tener cuidado de que no se caiga el TV 301 Navigator y de no someterlo a golpes o vibraciones. 87-900-946-01(B) Downloaded from www.Manualslib.com...
  • Seite 13 “Technical Information”). cámara de vacío mediante los accesorios mecánicos específicos El LED verde LD1 situado en el panel de la base del TV 301 Varian. Para más detalles véase el anexo “Technical Information”. indica, con la frecuencia de su parpadeo, las condiciones...

  • Seite 14: Instruções Para O Uso

    Para evitar problemas de perdas de gás, não tocar com as mãos específicas. os componentes destinados à exposição do vácuo. Utilizar O TV 301 Navigator é um sistema integrado, constituído por uma sempre luvas ou outra protecção adequada. bomba turbomolecular para aplicações de alto e ultra-alto vácuo, integrada no relativo controller.
  • Seite 15 TIPO DE BORNE TORQUE DE Acendimento e Utilização do TV 301 Navigator APERTO Para ligar o TV 301 é suficiente fornecer a tensão de alimentação. O ISO 100 Borne duplo com rosca 22 Nm controller incorporado reconhece automaticamente os sinais de interlock e de activação, e acciona a bomba.

  • Seite 16: Algemene Informatie

    GEBRUIKSAANWIJZINGEN Zorg er bij het uitpakken voor dat de TV 301 Navigator niet kan ALGEMENE INFORMATIE vallen en geen stoten of trillingen te verduren krijgt. Deze apparatuur is bestemd voor beroepsmatig gebruik. De Laat verpakking niet ergens buiten achter. gebruiker wordt verzocht aandachtig deze handleiding en alle...
  • Seite 17 DESCRIPTION” in de bijlage “Technical Information”). vacuümpomp worden bevestigd met behulp van de speciale De groene LED LD1 op het paneel van de basis van de TV 301 mechanische bevestigingselementen van Varian. Zie voor meer geeft door de frequentie van zijn knipperen, de werkcondities van informatie de bijlage "Technical information".

  • Seite 18: Brugsanvisning

    TV 301 Navigator leveres i en speciel beskyttende emballage. Kontakt den lokale forhandler, hvis emballagen viser tegn på skader, der kan være opstået under transporten. Sørg for, at TV 301 Navigator ikke tabes eller udsættes for stød ved udpakningen. Smid ikke emballagen ud. Materialet kan genbruges 100% og opfylder EU-direktiv 85/399 om miljøbeskyttelse.
  • Seite 19 Varian monteringsudstyret. I Information”). bilaget “Teknisk Information” findes yderligere detaljer. Den grønne LED LD1, der er anbragt på panelet på TV 301’s fundament, angiver systemets funktion ved blink: BEMÆRK konstant tændt: pumpen er i normal rotation Navigator TV 301 kan ikke fastgøres i fundamentet.

  • Seite 20: Allmän Information

    Kunden ska alltid mjukstarta de turbomolekylära pumparna (se schemat i "Technical information"). när de mottas och sätts i drift för första gången. TV 301 Navigator kan installeras i valfri position. Fäst pumpen i ett • De turbomolekylära pumparna kan lagras i 10 månader från stabilt läge genom att ansluta pumpens intagsfläns till en fast...

  • Seite 21: Underhåll

    ISO 100 Dubbel klammer, 22 Nm Start och användning av TV 301 Navigator gänga M10 För att starta TV 301 behöver du bara ansluta till ett eluttag. Den Enkel klammer, 11 Nm inbyggda styrenheten känner automatiskt igen förreglings- och gänga M8 startsignaler, och startar pumpen.

  • Seite 22: Brukerveiledning

    Viser denne tegn på skader som kan ha oppstått under transporten, må du ta kontakt med det lokale salgskontoret. Når TV 301 Navigator pakkes ut, må du se til at det ikke slippes ned eller utsettes for noen form for støt.
  • Seite 23 VEDLIKEHOLD Forsikre deg om at isoleringen av anordningen koplet til TV 301 Navigator har en egnet isolering, også under forhold med en enkel TV 301 Navigator er vedlikeholdsfritt. Alt arbeid på systemet må...

  • Seite 24: Yleisiä Tietoja

    • lämpötila: -20 °C - 70 °C. liitteestä. • suhteellinen kosteus: 0 - 95% (ei tiivistävä). TV 301 Navigator tulee kytkeä pääpumppuun (ks. “Tekniset tiedot” • Asiakkaan tulee aina käynnistää turbomolekyylinen pumppu -liitteen kaaviota). soft-start-tavalla vastaanottaessaan pumpun ja käyttäessään sitä ensimmäisen kerran.
  • Seite 25 Turbopumppu ConFlat-sisääntulolaipalla tulee kiinnittää tyhjiökammioon sopivien Varianin mekaanisten varusteiden avulla. Vihreä LED LD1, joka sijaitsee TV 301:n perustan paneelissa, Lisätietoja löytyy “Tekniset tiedot” -liitteestä. osoittaa vilkkumistiheydellään järjestelmän toimintaolosuhteet: HUOM palaa jatkuvasti: pumppu pyörii normaalisti; vilkkuu hitaasti (noin 400 ms:n jakso): systeemi on kiihdytys-, TV 301 Navigatoria ei voida kiinnittää...

  • Seite 26: Pdhgies Crhsews

    • øTecnik◊j Plhrofor∂ejø gia perissÒterej leptom◊reiej. kat£ th metafor£, th diak∂nhsh kai thn apoqÿkeush twn To TV 301 pr◊pei na e∂nai sundedem◊no se m∂a prwteÚousa antl∂a antlièn den pr◊pei na uperba∂nontai oi exÿj periballontik◊j (bl◊pe scÿma stij øTecnik◊j Plhrofor∂ejø). sunqÿkej¿...
  • Seite 27 M10 22 Nm Monÿ dagk£nh /Enaush kai Crÿsh tou TV 301 Navigator el∂kwsh M10 Gia na an£yete to TV 301 arke∂ na promhqeÚsete thn t£sh controller trofodÒthshj. enswmatwmevnoÇ anagnwrivzei H tourmpoantl∂a me fl£ntza eisÒdou ConFlat pr◊pei na sterewqe∂ interlock kai automavtwÇ...

  • Seite 28: General Information

    • the turbomolecular pumps must be always soft-started when The TV 301 Navigator can be installed in any position. Fix the TV received and operated for the first time by the customer 301 Navigator in a stable position connecting the inlet flange of the •...

  • Seite 29: Emergency Stop

    Switching on and Use of TV 301 Navigator chamber by means of clamps or claws. The following table shows, To switch on the TV 301 Navigator it is necessary to supply the for each flange and fixing device, the necessary number of clamps mains.

  • Seite 30: Description Of The Tv 301 Navigator

    TECHNICAL INFORMATION DESCRIPTION OF THE TV 301 NAVIGATOR The TV 301 Navigator pumping system consists of a pump with a dedicated controller fixed to it. The system is available in various models that differ in the high vacuum flange and the controller.

  • Seite 31: Controller Description

    The pump can be water cooled or air cooled: in Start-up time < 3 minutes the first case the customer can use the dedicated Recommended mechanical: Varian SD 300 channels on the pump body, in the second case forepump diaphragm: Varian MD 60 an external optional fan is available.

  • Seite 32: Tv 301 Navigator Outline

    TV 301 NAVIGATOR OUTLINE NOTE The following figures show the TV 301 Navigator When the TV 301 Navigator has been stored at a outlines (dimensions are in inches [mm]). temperature less than 5°C, wait until the system has reached the above mentioned temperature.
  • Seite 33 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure 87-900-946-01(B) Downloaded from www.Manualslib.com manuals search engine...
  • Seite 34 TECHNICAL INFORMATION Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump Graph of nitrogen throughput test 87-900-946-01(B) Downloaded from www.Manualslib.com manuals search engine...

  • Seite 35: Interconnections

    TECHNICAL INFORMATION INTERCONNECTIONS J5 - IN-OUT The following figure shows the TV 301 intercon- nections. This connector carries all the input and output sig- nals to remote control the TV 301 Navigator. It is a 15-pins D type connector; the available sig- nals are detailed in the table, the following para- graphs describe the signal characteristics and use.
  • Seite 36 TECHNICAL INFORMATION For example: SPEED SETTING: PWM input signal to set the - reference quantity: frequency pump speed. The PWM signal characteristics - threshold: 500 Hz must be the following: • - hysteresis: 1% frequency: 100 Hz +/-20% - activation type: "high level" •...
  • Seite 37 TECHNICAL INFORMATION How to connect the open collector input of the controller Here below there are the typical connections of the open collector input of TV301 Navigator to an external system. Two cases are considered: 1. the customer supplies the 24 Vdc 2.

  • Seite 38: P2 - Serial

    This is a 9 pin D-type serial input/output connector type where: to control via an RS 232 or RS 485 connection the • Host = MASTER TV 301. • Controller = SLAVE PIN N. SIGNAL NAME The communication is performed in the following...
  • Seite 39 TECHNICAL INFORMATION − <STX> (Start of transmission) = 0x02 Source: Controller Destination: PC − <ADDR> (Unit address) = 0x80 (for RS 232) <ADDR> (Unit address) = 0x80 + device num- ber (0 to 31) (for RS 485) − <WIN> (Window) = a string of 3 numeric char- STX ADDR ACK ETX acter indicating the window number (from ‘000’...

  • Seite 40: Window Meanings

    (on = closed) (default) or Serial Serial = 0 (default = 1) configuration (default = 1) Reserved to Varian service Soft Start YES = 1 (write only in Stop NO = 0 Set the vent valve Automatic = 0 (see...

  • Seite 41: Inlet Screen Installation

    CRC Param. (PA) PA8XXXX (where “XXXX” are variable) CRC Parameter "XXXX" structure Reserved to Varian service RS 485 address 0 to 31 (default = 0) Serial type select 0 = RS 232 1 = RS 485 (default = 0) NOTES 1.

  • Seite 42: Heater Band Installation

    TECHNICAL INFORMATION The screen can be removed as shown in the fol- HEATER BAND INSTALLATION lowing figure. The heater band model 969-9804 and 969-9803 can be used to heat the pump casing when a bakeout is needed. The heater band is applied to the upper part of the pump casing, as shown in the figure, and heats it to a temperature of about 80°...

  • Seite 43: Air Cooling Kit Installation

    TECHNICAL INFORMATION To fix the fan to the TV 301 case execute the fol- CAUTION lowing procedure (see the following figure): If the chamber of the system is "baked" at a high temperature, a shield should be installed to pre- 1.

  • Seite 44: Water Cooling Kit Installation

    TECHNICAL INFORMATION The metallic model is assembled as shown in the WATER COOLING KIT INSTALLATION figure. Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (me- tallic model), and 969-9347 (plastic model).

  • Seite 45: Vent Accessories

    The vent valve and vent device allow to avoid un- desired venting of the pump during temporary power failure and enables an automatic vent op- eration. TV 301 Navigator Controller Compatible Vent Valve mod. 969-9834 This vent valve waits before opening a minimum CAUTION time of about 5 sec.

  • Seite 46: Vibration Isolator Installation

    − model 969-9335 for CFF 8” flange. They typically reduce the vibration transmitted The vent device has adjustable delay time (up to from the TV 301 Navigator to the system by a fac- 36 min.). tor of 20. To install the vent device unscrew and remove the Please refer to the relevant instruction manual.

  • Seite 47: Serial Cable Installation

    The supplied serial cable must be installed when 5. Turn the pump again; the TV 301 Navigator or the optional vent valve have to be controlled by means of a remote com- 6. Plug the line cord and connect the pump cable puter.

  • Seite 48: Side Mounting

    TECHNICAL INFORMATION Side mounting TYPICAL LAYOUT DIAGRAM NOTE With Navigator Controller The L-shaped bracket (P/N 969-9349) is available as an option. See the following figure. 1. Screw the 4 fixing studs (provided with the ac- cessories bag) in the holes on the L-shaped bracket;...

  • Seite 49: With Standard Rack Controller

    10. Fore-vacuum pump control relay For ConFlat flange connections we recommend 11. Connection for water cooling using Varian hardware. 12. Roughing line with valve (optional) To facilitate assembly and dismantling, apply Fel- 13. Turbopump pro C-100 high temperature lubricant to the screw threads protruding from the flange and between 14.

  • Seite 50: Connection Configurations

    TECHNICAL INFORMATION Connection configurations Connection B - FORE-VACUUM PUMP Connection C - ELECTRICAL A flange KF 16 NW is available to connect the Turbo-V301 pump to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid pipe is used, any vibration generated by the mechanical pump must be eliminated through the use of bellows.

  • Seite 51: Pump Used With Corrosive Gases

    3. Gas purge valve CAUTION 4. Gas purge port 5. Forevacuum pump To prevent bearing damage, Varian suggests a 6. Turbopump minimum purge gas flow rate of 10 sccm (0.17 7. Vent valve mbar l/s). This value can be exceeded, according to the process requirements.

  • Seite 52: Pump Used In Presence Of Magnetic Fields

    969-9334 Vibration isolator, ISO 160 969-9345 However if the effect is grater, than the case should be carefully reviewed by Varian's special- Vibration isolator, CF 8" 969-9335 ist. As a matter of fact, in case of high magnetic Vent flange, NW 10 KF / M8...
  • Seite 53 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
  • Seite 54 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
  • Seite 55 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...

Inhaltsverzeichnis