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5.7 Sensor Parameters
Sensor Transition (ST)
By default the VSR/VCR performs a continuous transition between Pirani and pie-
zo range whereupon an assimilation of the sensor signals is carried out.
In order to adapt the performance of the transducer to the requirements of the
vacuum process the following options can be configured by means of parameter
»Sensor Transition« (ST):
»0«:
no transition, but direct switch-over between Pirani and piezo
sensor at 1 mbar
»1«:
continuous transition in the range 5.0 ... 15 mbar (default)
D[p]:
no transition, but direct switch-over between Pirani and piezo
sensor at pressure p
F[p1] T[p2]:
continuous transition in the range p1 ... p2
Value range:
p, p1, p2: 1 ... 20 mbar
) Not accessible via Profinet
The piezo sensor measures independently of the type of gas, whe-
reas the measurement of the Pirani depends on the type of gas.
Hence, adjusting the transition range of the sensors or the pressure
for direct switch-over will also affect the range where the VSR/VCR
output is independent of the gas type.
For the default setting (ST=1) this will be the case if the pressure
reading is above 15 mbar.
Gas Correction Factor (C1)
The measurement signal of the VSR/VCR in the Pirani range depends on type and
composition of the gas being measured. The unit is adjusted for N
other gases the pressure display can be corrected below 0.1 mbar by setting a
correction factor.
The measurement results of the sensor are then multiplied with the correction fac-
tor by the unit's microcontroller, thereby providing a corrected pressure reading as
digital output.
Value range: 0.20 ... 8.0
Correction factor C1 Pirani:
Ar
CO
1.6
1.0
CO
H
2
2
0.89
0.57
He
N
2
1.0
1.0
VSR/VCR-Profinet-200616
and dry air. For
2
Ne
Kr
1.4
2.4
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