Brooks Instrument 48 Serie Bedienungsanleitung Seite 8

Section 1 Introduction
®
Brooks 48xx Series
Table 1-1 48xx Series Specifications
P P P P P erformance erformance erformance erformance erformance
Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range
Con Con Contr tr tr tr trol Range Con Con ol Range ol Range ol Range ol Range
Flow Accur Flow Flow Flow Flow Accur Accur Accuracy Accur acy acy acy acy
Flow Repeatability Flow Repeatability
Flow Repeatability Flow Repeatability Flow Repeatability
Response Response Time Time
Response Time Response Response Time Time
T T T T T emper emper emperatur emper emper ature Coefficien atur atur atur e Coefficien e Coefficien e Coefficient t t t t e Coefficien
Ratings Ratings
Ratings Ratings Ratings
Gases Gases
Gases Gases Gases
Oper Oper Operating Limits Oper Oper ating Limits ating Limits ating Limits ating Limits
Differen en en en ential Pr Differ Differ tial Pressur tial Pr tial Pr essur essur essure Range e Range e Range e Range
Differ Differ tial Pr essur e Range
(Con (Contr tr tr tr trollers) (Con (Con (Con ollers) ollers) ollers) ollers)
Leak In Leak In Leak Integrity Leak In Leak In tegrity tegrity tegrity tegrity
Mechanical Mec Mec hanical hanical hanical
Mec Mec hanical
Materials of Construction Materials of Construction Materials of Construction
Materials of Construction Materials of Construction
RoHS RoHS RoHS RoHS RoHS
Outline Dimensions Outline Dimensions Outline Dimensions Outline Dimensions Outline Dimensions
Pr Pr Pr Pr Process Connections ocess Connections ocess Connections ocess Connections
ocess Connections
Electrical Electrical
Electrical Electrical Electrical
Electrical Connections Electrical Connections Electrical Connections Electrical Connections Electrical Connections
P P P P P ower Supply ower Supply V V V V V oltage** ower Supply ower Supply oltage** oltage** oltage**
ower Supply oltage**
P P P P P ower Requir ower Requir ower Requir ower Requiremen ower Requir ements ts ts ts ts emen emen emen
Analog Input/Output Analog Input/Output
Analog Input/Output Analog Input/Output Analog Input/Output
Digital Input/Output Digital Input/Output Digital Input/Output Digital Input/Output Digital Input/Output
V V V V V alve Override Signal alve Override Signal alve Override Signal alve Override Signal alve Override Signal
** For high flows and/or low differential pressures (using orifices 0.049" (1.25mm) or 0.079" (2.0mm)) only 24 Vdc power is available.
Local Operator In Local Oper Local Oper Local Oper Local Oper ator Interface (L ator In ator In ator In terface (L terface (LOI) terface (L terface (L
Display Display Display Display Display
Oper Operating Limits Oper ating Limits ating Limits ating Limits
Oper Oper ating Limits
Electrical Connections Electrical Connections Electrical Connections Electrical Connections Electrical Connections
P P P P P ower Supply ower Supply ower Supply ower Supply ower Supply V V V V V oltage oltage oltage oltage oltage
Materials of Construction Materials of Construction Materials of Construction Materials of Construction Materials of Construction
RoHS RoHS RoHS RoHS RoHS
Outline Dimensions Outline Dimensions Outline Dimensions Outline Dimensions Outline Dimensions
Refer to Brooks document X-SE-4800-LOI-eng for complete instructions.
1-2
50 ml/min - 40 l/min
(50 sccm - 40 slpm)
(N eq., at 0 o C Ref, with typical 50 psid pressure differential)
2 2 2 2 2
2 - 100%
+/- 3.0% of FS, +/- 1.0% FS optional
+/- 0.15% of FS
Flow signal: <0.3 sec
Flow control: Settling time <0.75 sec from 0 to 100% FS (typical <0.5 sec for all steps)
+/- 0.1% of FS/ C (N
o
Air, N , O , Ar, He, H
2 2
Pressure
Temperature
Humidity
Minimum: 0.35 bar (5 psid)
Maximum: 10 bar (150 psid)
Inboard to Outboard: 1x10
Wetted parts: stainless steel, fluoroelastomers, silicon-based sensor
Fully RoHS compliant per EU Directive 2011/65/EU
Refer to Figures 1-1 & 1-2
Inlet/Outlet threads: 9/16" - 18 UNF threads, Refer to Figure 6 for available process connections.
15-pin D-sub connector
Analog/RS232: 15-pin D-sub connector
+15 Vdc + 10% or
+24 Vdc + 10%
Device only uses single sided power supply
Inrush current: < 1 A
Model Device
Type
4850 Controller
4860 Meter
0-5 Vdc or 4-20 mA
RS232 (Standard with all analog I/O options)
Valve Controller: Input Open
Valve Closed: <0.3 V; open valve: >4.8 V
OI) OI) OI) OI)
Effective display area: 28mm wide, 11mm high
Display Contents: 8x2 dot matrix display
Temperature
Operating Humidity 5 to 95% R.H. (ambient)
2 15-pin D-sub connectors, one for the connection to the 48xx Series and one for the remote connection
The LOI optionally includes a wall mount power adaptor with a 3.5-mm DC-plug. The adaptor works with input
voltages of AC 90-240 V/47-63Hz. The adaptor supports European, U.K., Australia and U.S. wall plugs. Power can
also be supplied by a remote connection via the D-connector.
Enclosure: ABS plastic with CU-Ni plating
Fully RoHS compliant per EU Directive 2011/65/EU.
Refer to Figure 1-3
)
2 2 2 2 2
, CO , CO, N O, CH , C H (Propene), C
2 2 2 4 3 6
0 - 10 barg (0 - 150 psig)
0 - 50 C
o
5 to 95% R.H. (ambient)
-9 atm scc/sec Helium max.
15 Vdc
Typical (mA) Max (mA)
130 160
30 60
0-50 C
o
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
H (other gases upon request)
3 8
24 Vdc
Typical (mA) Max (mA)
150 200
30 60
October, 2017