17
Technical Information
Pump Purging and Venting
How to Vent the Turbo-V 2300 TwisTorr Pump
The recommended procedure to vent the system is described in the
following points:
1
2
3
4
5
6
Additionally, the vent port on the envelope can be used to connect an
external vent valve: unscrew the threaded plug and screw the vent
valve into the pump to vent pump and system.
The last described venting modalities should be avoided because they
may cause uncontrolled venting. Please contact Agilent if you cannot
oper-ate in the instructed manner.
Uncontrolled venting may seriously damage the pump and void the pump
CAUTION!
warranty. Use the Agilent "Controlled Vent Procedure" or contact Agilent.
248/260
Close the process gases flowing into the system.
Leaving the Turbo-V 2300 TwisTorr pump and the backing pump
running and the purge gas flowing, wait for enough time to
evacuate the process gases from the system (e.g. to reach the
typical basic process pressure).
Then close the gate valve connecting the Turbo pump to the
chamber (if present) and the valve connecting the Turbo pump to
the rough pump (if present).
Turn off the Turbo pump.
Open the vent port until you reach atmospheric pressure.
When the Turbo-V 2300 TwisTorr pump and the backing pump
are stopped and the system is at atmospheric pressure, for a
better bearing protection it is advisable to leave the purge gas
flowing into the Turbo-V pump, with the chamber or the Turbo-V
vent valve opened, to avoid system overpressures. If the vent
valve can't be kept opened, the backing pump should be left
operating.
Turbo-V 2300 TwisTorr Pumps User Manual / 87-901-017-01
(B)