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Installation and Operation Manual
X-TMF-585xEMH-MFC-eng
Part Number: 541B212AAG
February, 2016
Table 4-3 Conversion Factors (Nitrogen Base) (Continued)
GAS NAME
Oxygen
Oxygen Difluoride
Ozone
Pentafluoroethane
Pentane (n-Pentane)
Perchloryl Fluoride
Perfluoro-2-Butene
Perfluorobutane
Perfluoromethyl-vinylether
Perfluoropropane
Phosgene
Phosphine
Phosphorous Oxychloride
Phosphorous Pentafluoride
Phosphorous Trifluoride
Propadiene
Propane (same as CH3CH2CH3)
Propylene (Propene)
Rhenium Hexafluoride
Silane
Silicon Tetrachloride
Silicon Tetrafluoride
Sulfur Dioxide
Sulfur Hexafluoride
Sulfur Tetrafluoride
Sulfur Trioxide
Sulfuryl Fluoride
Tetrachloromethane
Tetraethylsilane
Tetrafluoroethylene (TFE)
Tetrafluorohydrazine
Tetramethylsilane
Titanium Tetrachloride
Toluene
Trans-2-Butene
FORMULA
O2
OF2
O3
f-125
C2HF5
C5H12
ClO3F
C4F8
C4F10
PMVE
PMVE
C3F8
COCl2
PH3
POCI3
PF5
PF3
C3H4
C3H8
C3H6
ReF6
SiH4
SiCl4
SiF4
SO2
SF6
SF4
SO3
SO2F2
CCl4
C8H20Si
C2F4
N2F4
C4H12Si
TiCI4
(C6H5)CH3
C4H8
Section 4 Maintenance &
Brooks
SENSOR
ORIFICE
FACTOR
FACTOR
0.988
1.067
0.672
1.388
0.738
1.310
0.287
2.070
0.212
1.605
0.448
1.905
0.268
2.672
0.738
2.918
0.296
2.029
0.179
2.591
0.504
1.881
0.783
1.100
0.327
2.340
0.346
2.109
0.495
1.770
0.439
1.196
0.343
1.274
0.401
1.234
0.230
3.279
0.625
1.070
0.310
2.462
0.395
1.931
0.728
1.529
0.270
2.348
0.353
1.957
0.535
1.691
0.423
1.931
0.344
2.345
0.111
2.270
0.361
1.905
0.367
1.926
0.183
1.775
0.296
2.602
0.234
1.814
0.291
1.435
Troubleshooting
®
Model 585xEMH
DENSITY
SEMI ID
3
(km/m
)
1.429
15
2.402
41
2.138
30
5.360
155
3.222
240
4.571
72
8.933
236
10.61
241
5.131
8.396
128
4.418
60
1.517
31
6.847
102
5.620
143
3.906
62
1.789
66
2.008
89
1.875
69
13.41
243
1.440
39
7.579
108
4.648
88
2.858
32
6.516
110
4.776
86
3.575
246
4.648
87
6.858
101
6.445
317
4.526
94
4.624
157
3.940
251
8.470
114
4.115
181
2.503
98
4-11
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