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17
Technical Information
Technical Specification
Technical Specification
Tab. 3
Technical Specification
CHARACTERISTIC
Pumping speed (with inlet screen)
N
:
2
He:
H
2:
Compression ratio
N
:
2
He:
H
:
2
Base pressure
(According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test
dome bake-out, with a Turbopump fitted
with a ConFlat flange and using the
recommended pre-vacuum pump)
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended forepump
Mechanical
Dry
Operating position
Operating ambient temperature
Cooling requirements
Cooling water
Bakeout temperature
242/300
TV 551
CFF 6":
CFF 8"/ISO160:
350 l/s
550 l/s
450 l/s
600 l/s
450 l/s
510 l/s
1 x 10
9
1 x 10
7
1 x 10
6
with minimum recommended mechanical pump:
< 1 x 10
-10
(< 1 x 10
-10
with minimum recommended diaphragm pump:
2 x 10
mbar
-9
(1.5 x 10
-9
ISO 160, CF 6", CF 8"
KF 25 NW
42000 rpm
< 5 minutes
Agilent DS 302
Agilent Triscroll PTS 300
Any
+5 °C to +35 °C
Natural air convection
Water optional (use water with electrical conductivity
≤ 500 μS/cm)
flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
120° C at inlet flange max.(CF flange)
80° C at inlet flange max.(ISO flange)
TV 551/701 Navigator User Manual / 87-900-934-01
TV 701
CFF 10"/ ISO200:
690 l/s
620 l/s
510 l/s
1 x 10
1 x 10
1 x 10
mbar
Torr)
torr)
ISO 200, CF 10"
9
7
6
(M)
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