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Technical Specification
Tab. 2
Pumping speed (with inlet screen)
Compression ratio
Base pressure with recommended
forepump
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended forepump
Operating position
Operating ambient temperature
Bakeout temperature
Vibration level (displacement)
Lubricant
Cooling requirements
Noise level
TV 801 Navigator User Manual / 87-900-953-01
Technical Specification
N
:
2
He:
H
:
2
N
:
2
He:
H
:
2
(G)
Technical Information
Technical Specification
ISO 160:
680 l/s
810 l/s
850 l/s
>1 x 10
9
5 x 10
7
2 x 10
6
< 1 x 10
mbar
-10
(< 1 x 10
Torr)
-10
(According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test dome
bake-out, with a Turbopump fitted with a ConFlat
flange and using the recommended pre-vacuum
pump)
ISO 160
KF 40 NW
38000 rpm
< 4 minutes
DS 402, TriScroll 300
Any
+10 °C to +45 °C
120° C at inlet flange max.(CF flange)
80° C at inlet flange max.(ISO flange)
< 0.01 μm at inlet flange
permanent lubrication
Forced air
<55 dB(A) at 1 meter
17
213/252
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