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Technical Information
Model
Interface dimensions
Peak pumping speed
Media
Ultimate pressure
Maximum inlet pressure
Maximum outlet pressure
Inlet connection
Exhaust connection
Gas ballast
Ambient operating temperature
Storage temperature
Motor rating
Operating voltages
Run current
Motor thermal protection
Operating speed
Cooling system
Weight
Leak rate (with exhaust sealed)
Noise Level (per ISO 11201)
Vibration level at inlet (per ISO 10816-1)
Fuse type
Hour meter
Conformance standards
SH-110 Dry Scroll Vacuum Pump
Table 1 Specifications
SH-110 Dry Scroll Single Hermetic Vacuum Pump
See Figure 1 on page 16
50 Hz: 90 L/m, 5.4 m
60 Hz: 110 L/m, 6.6 m
See Figure 2 on page 16 for details
No corrosive, explosive or particulate forming gases
−
2
5.0 x 10
Torr (6.6 x 10
1.0 atmosphere (0 psig)
1.5 atmosphere (7.5 psig)
NW25
Female 1/4" National Pipe Thread (NW16 adapter provided)
Female 1/8" National Pipe Thread, (20 micron sintered plug provided)
5 °C to 40 °C (41 °F to 104 °F)
–20 °C to 60 °C (–4 °F to 140 °F)
0.25 HP (0.19 kW)
1 phase/50-60 Hz/100-115:200-230 VAC
See Table 3 on page 20
Automatic thermal protection
60 Hz: 1725 RPM, 50 Hz: 1425 RPM
Air-cooled
Pump only: 19.5 kg (43 lbs)
Shipping weight: 20 kg (44 lbs)
−
7
<1 x 10
sccs helium
56 dB(A)
Class 1B, 1.5 mm/s
M5 x 20 mm, 10 A, Slo-Blo,
Littelfuse Model H215010 or equivalent
Integral Hour Meter provided, displays running time to closest .1 hour
Conforms to SEMI S2-2000 and applicable CSA, CUS, and CE standards.
3
/hr (3.3 cfm)
3
/hr (4.0 cfm)
−
2
mbar)
15
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