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primes HP-MSM-I Originalbetriebsanleitung Seite 142

Highpower-microspotmonitor-industry
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PRIMES
Reg.
Profibus-
Adr.
Adresse
26
Add.Results
52+53
27
54+55
28
56+57
29
58+59
30
60+61
31
62+63
32
64+65
33
66+67
34
68+69
35
70+71
36
72+73
37
74+75
38
76+77
39-41
78-83
142
Name
Funktion/Beschreibung
2 byte
PosX_Reg
Deviation of laser spot in X related to
mesurement window
2 byte
PosY_Reg
Deviation of laser spot in Y related to
mesurement window
2 byte
PosZ_Reg
Deviation of laser spot in Z related to
mesurement window
2 byte
MaxOptLoad
Maximum power due to optical load
2 byte
FocRadX
focus radius in X of last caustic
measurement (w0x)
2 byte
FocRadY
focus radius in Y of last caustic
measurement (w0y)
2 byte
FocPosX
Focus position in X (x0)
2 byte
FocPosY
Focus position in Y (y0)
2 byte
Msquare
M² of laser beam as characteristic
parameter for diffraction limit
2 byte
MsquareX
M² of laser beam as characteristic
parameter for diffraction limit in X (M²x)
2 byte
MsquareY
M² of laser beam as characteristic
parameter for diffraction limit in Y (M²y)
2 byte
BeamDirX
Beam direction in X
2 byte
BeamDirY
Beam direction in Y
6 byte
Reserved
HP-MSM-I Parallel/PROFIBUS
32byte
AddResultsModul
Revision 02/2018 DE
®

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