Brooks Instrument PC100 Serie Installations- Und Bedienungsanleitung Seite 32

Section 4 Maintenance & Troubleshooting
PC100 Series
Table 4-2 PC100 Series Troubleshooting Guide (Continued)
Symptoms & Possible Causes
8. OEM tool does not read correct PC100 Series
Is the differential pressure across the
PC100 Series really zero?
Is the PC100 Series mounted in the proper attitude?
Is the flow output signal of the PC100 Series
really zero?
9. Zero Drift.
Improper zero of the PC100 Series?
Excessive Valve leakage?
10. PC125 Flow Meter Calibration Drift.
Gas box temperature too high?
Is it linear offset?
11. PC100 Series indicates Overshoot.
Additional PID adjustments may be required
per the application.
12. Tool display output doesn't match PC125 Series flow meter output.
Improper zeroing of the PC125 flow meter?
4-6
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Corrective Action
pressure or flow meter
PC100 Series valve leakage.
Incorrect MFC zero.
PC100 Series aging or sensor stabilization.
Zero is not correct.
Zero is not correct.
Contact the factory for support.
Check PC125 Series zero.
Installation and Operation Manual
X-PR-PC100-Series-PC-eng
Part Number: 541B207AAG
zero reading.
May, 2017