Agilent Technologies Turbo-V 2000 ICE Bedienungshandbuch Seite 200

16 Instructions for Use
Use
Figure 3
1 Logic signals input/output connector that also checks the power supplied to the pump and
the excitation frequency (the coupling connector is provided with the appropriate loop-back
plug).
2 Logic signals input/output connector in compliance with the SEMI specifications.
3 Power out socket (120 Vac, 1 A) for power supply to the optional devices (vent device,
primary pump activation relay, etc).
4 Pump cable socket.
5 Power supply line input connector.
6 Heater jacket power cord socket.
7 Provision for RS-232 - RS-422 - RS-485 communication port connector (provided as an
option).
8 Line switch with magnetothermal protection.
9 Heater jacket power supply fuse.
10 Flow meter connection cable socket.
11 Ground connection.
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Controller 969-9448 and 969-9449 rear panel
Turbo-V 2000 ICE Controller User Manual / 87-900-929-01 (L)